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Materials Science-Poland
Volume 38 (2020): Issue 1 (March 2020)
Open Access
Micro-structural and bonding structure analysis of TiAlN thin films deposited with varying N
2
flow rate via ion beam sputtering technique
Soham Das
Soham Das
,
Mukul Gupta
Mukul Gupta
,
Ashis Sharma
Ashis Sharma
and
Bibhu P. Swain
Bibhu P. Swain
| May 08, 2020
Materials Science-Poland
Volume 38 (2020): Issue 1 (March 2020)
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Published Online:
May 08, 2020
Page range:
122 - 131
Received:
Oct 13, 2018
Accepted:
Apr 23, 2019
DOI:
https://doi.org/10.2478/msp-2020-0006
Keywords
TiAlN
,
GIXRD
,
FE-SEM
,
XANES
© 2020 Soham Das et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
Soham Das
Department of Mechanical Engineering, Sikkim Manipal Institute of Technology Sikkim Manipal University
Rangpo, India
Mukul Gupta
UGC-DAE Consortium for Scientific Research University Campus
Indore, India
Ashis Sharma
Department of Mechanical Engineering, Sikkim Manipal Institute of Technology Sikkim Manipal University
Rangpo, India
Bibhu P. Swain
Department of Physics, National Institute of Technology
India