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Materials Science-Poland
Volume 38 (2020): Issue 1 (March 2020)
Open Access
Micro-structural and bonding structure analysis of TiAlN thin films deposited with varying N
2
flow rate via ion beam sputtering technique
Soham Das
Soham Das
,
Mukul Gupta
Mukul Gupta
,
Ashis Sharma
Ashis Sharma
and
Bibhu P. Swain
Bibhu P. Swain
| May 08, 2020
Materials Science-Poland
Volume 38 (2020): Issue 1 (March 2020)
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Published Online:
May 08, 2020
Page range:
122 - 131
Received:
Oct 13, 2018
Accepted:
Apr 23, 2019
DOI:
https://doi.org/10.2478/msp-2020-0006
Keywords
TiAlN
,
GIXRD
,
FE-SEM
,
XANES
© 2020 Soham Das et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.