Micro-structural and bonding structure analysis of TiAlN thin films deposited with varying N₂ flow rate via ion beam sputtering technique

[1] Hultman L., Vacuum, 57 (2000), 1.10.1016/S0042-207X(00)00143-3Search in Google Scholar

[2] Das S., Guha S., Ghadai R., Kumar D., Swain B.P., Appl. Phys. A, (2017), 123:412.10.1007/s00339-017-1032-0Search in Google Scholar

[3] Guha S., Das S., Bandyopadhyay A., Das S., Swain B.P., J. Alloy. Compd., 731 (2018), 347.10.1016/j.jallcom.2017.09.340Search in Google Scholar

[4] Barshilia H.C., Rajam K.S., J. Mater. Res., 19 (2004), 3196.10.1557/JMR.2004.0444Search in Google Scholar

[5] Gago R., Cubero A.R., Endrino J.L., Jimenez I., Shevchenko N., J. Appl. Phys., 105 (2009), 113521.10.1063/1.3139296Search in Google Scholar

[6] Munz W.D., J. Vac. Sci. Technol. A, 4 (1986), 2717.Search in Google Scholar

[7] Alling B., Ruban A.V., Karimi A., Peil O.E, Simak S.I., Hultman L., Abrikosov I.A., Phys. Rev. B, 75 (2007), 045123.10.1103/PhysRevB.75.045123Search in Google Scholar

[8] Al-Bukhaitia M.A., Al-Hatab K.A., Tillmann W., Hoffmann F., Sprute T., Appl. Surf. Sci., 318 (2014), 180.10.1016/j.apsusc.2014.03.026Search in Google Scholar

[9] Kilinc B., Cegil O., Sen S., Sen U., Acta Phys. Pol. A, 125 (2014), 362.10.12693/APhysPolA.125.362Search in Google Scholar

[10] Jalali R., Parhizkar M., Bidadi H., Naghshara H., Hosseini S.R., J. Kor. Phys. Soc., 66 (2015), 978.10.3938/jkps.66.978Search in Google Scholar

[11] Shanga H., Li J., Shao T., Appl. Surf. Sci., 310 (2014), 317.10.1016/j.apsusc.2014.03.099Search in Google Scholar

[12] Shtansky D.V., Gloushankove N.A., Bashkova I.A., Petrzihk M.I., Shevieko A.N., Kiryukhantsev-Korneev F.V., Reshetov I.V., Grigoryan A.S., Levasho E.A., Surf. Coat. Technol., 201 (2006), 4111.10.1016/j.surfcoat.2006.08.012Search in Google Scholar

[13] Pandey S.K., Pandey S.K., Awasthi V., Gupta M., Deshpande U.P., Mukherjee S., Appl. Phys. Lett., 103 (2013), 072109.10.1063/1.4818819Search in Google Scholar

[14] Subramanian B., Brindha G., Makoto T., Hiroshi N., Akira K., Trans. JWRI, 40 (2011), 2.Search in Google Scholar

[15] Cao M., Li D.J., Deng X.Y., J. Vac. Sci. Technol. A, 26 (2008), 1314.Search in Google Scholar

[16] Guo P., Wang S., Cui H., Key Eng. Mater., 443 (2010), 465.10.4028/www.scientific.net/KEM.443.465Search in Google Scholar

[17] Zhang H., Wang S., Guo P., Wang M., Tribol. Trans., 56 (2013), 968.10.1080/10402004.2013.815833Search in Google Scholar

[18] Tuilier M.H., Pac M.J., Covarel G., Rousselot C., Khouchaf L., Surf. Coat. Technol., 201 (2007), 4536.10.1016/j.surfcoat.2006.09.095Search in Google Scholar

[19] Stohr J., NEXAFS Spectroscopy, Springer, Berlin, 1992.10.1007/978-3-662-02853-7Search in Google Scholar

[20] Tuilier M.H., Pac M.J., Girleanu M., Covarel G., Arnold G., Louis P., Rousselot C., Flank A-M., J. Appl. Phys., 103 (2008), 083524.10.1063/1.2907415Search in Google Scholar

[21] Gago R., Soldera F., Hubner R., Lehmann J., Munnik F., Vazquez L., Redondo-Cubero A., Endrino J.L., J. Alloy. Compd., 561 (2013), 87.10.1016/j.jallcom.2013.01.130Search in Google Scholar

[22] Gupta M., Gupta A., Phase D.M., Chaudhari B., Dasannacharya A., Appl. Surf. Sci., (2003) 309.10.1016/S0169-4332(02)01120-0Search in Google Scholar

[23] Phase D.M., Gupta M., Potdar S., Behera L., Sah R., Gupta A., AIP Conf. Proc., 1591 (2014), 685.Search in Google Scholar

[24] Henry P., Pac M.J., Rousselot C., Tuilier M.H., Surf. Coat. Technol., 223 (2013), 79.10.1016/j.surfcoat.2013.02.033Search in Google Scholar

[25] Kumar T.S., Prabu S.B., Manivasagam G., J. Mater. Eng. Perform., 23 (2014), 2877.10.1007/s11665-014-1057-xSearch in Google Scholar

[26] Auger M.A., Vazquez L., Sanchez O., Jergel M., Cuerno R., Castro M., J. Appl. Phys., 97 (2005), 123528.10.1063/1.1937467Search in Google Scholar

[27] Auger M.A., Vazquez L., Cuerno R., Castro M., Jergel M., Sanchez O., Phys. Rev. B, 73 (2006), 045436.10.1103/PhysRevB.73.045436Search in Google Scholar

[28] Buranawong A., Witit-Anun N., Chaiyakun S., Pokaipisit A., Limsuwan P., Thin Solid Films, 519 (2011), 4963.10.1016/j.tsf.2011.01.062Search in Google Scholar

[29] Barshilia H.C., Prakash M.S., Jain A., Rajam K.S., Vacuum, 77 (2005), 169.10.1016/j.vacuum.2004.08.020Search in Google Scholar

[30] Kumar T.S., Prabu S.B., Manivasagam G., Int. J. Min. Met. Mat., 21 (2014), 796.10.1007/s12613-014-0973-ySearch in Google Scholar

[31] Ananthakumar R., Subramanian B., Kobayashi A., Jayachandran M., Ceram. Int., 38 (2012), 477.10.1016/j.ceramint.2011.07.030Search in Google Scholar

[32] Subramanian B., Muraleedharan C.V., Ananthakumar R., Jayachandran M., Surf. Coat. Technol., 205 (2011), 5014.10.1016/j.surfcoat.2011.05.004Search in Google Scholar

[33] Vashist M., Paul S., Philos. Mag., 92 (33) (2013), 4194.10.1080/14786435.2012.704429Search in Google Scholar

[34] Lindgren M., Lepisto T., NDTE Int., 34 (2001), 337.10.1016/S0963-8695(00)00073-6Search in Google Scholar

[35] Chen L., Du Y., Yin F., Li J., Int. J. Refract. Met. Hard. Mater., 25 (2007), 72.10.1016/j.ijrmhm.2006.01.005Search in Google Scholar

[36] Mote V.D., Puroshotham Y., Dole B.N., J. Theor. Appl. Phys., 6 (2012), 1.10.1186/2251-7235-6-6Search in Google Scholar

[37] Bare S. R., EXAFS data collection and analysis course APS, 2005.Search in Google Scholar

[38] Pfluger J.P., Fink J., Crecelius G., Bohnen K.P., Winter H., Solid State Commun., 44 (1982), 489.10.1016/0038-1098(82)90130-2Search in Google Scholar

[39] Wongpinij T., J. Met. Mater. Miner., 23 (2013), 59.Search in Google Scholar

[40] Magnuson M., Mattesini M., Höglund C., Birch J., Hultman L., Phys. Rev. B, 80 (2009), 155105.10.1103/PhysRevB.80.155105Search in Google Scholar

[41] Zou C.W., Yan X.D., Han J., Chen R.Q., Gao W., Metson J., Appl. Phys. Lett., 94 (2009), 171903.10.1063/1.3125255Search in Google Scholar

[42] Filatova E.O., Konashuk A.S., Sakhonenkov S.S., Sokolov A.A., Afanas’ev V.V., Sci. Rep., 7 (2017), 4541.10.1038/s41598-017-04804-4549578528674397Search in Google Scholar

[43] Fink J., Muller-Heinzerling T.H., Scheerer B., Speier W., Hillebrecht F.U., Fuggle J.C., Zaanen J., Sawatzky G.A., Phys. Rev. B, 32 (1985), 4899.10.1103/PhysRevB.32.48999937693Search in Google Scholar

[44] de Groot F.M.F., Fuggle J.C., Thole B.T., Sawatzky G.A., Phys. Rev. B, 41 (1990), 928.10.1103/PhysRevB.41.928Search in Google Scholar

[45] Soriano L., Abbate M., Fuggle J.C., Prieto P., Jiménez C., Sanz J.M., Galan L., Hofman S., J. Vac. Sci. Technol. A, 11 (1993), 47.10.1116/1.578718Search in Google Scholar

[46] Brydson R., Garvie L.A.J., Craven A.J., Sauer H., Hofer F., Cressey G., J. Phys. Condens. Mater., 5 (1993), 9379.10.1088/0953-8984/5/50/018Search in Google Scholar

[47] Filatova E.O., Sokolov A.A., Egorova Yu.V., Konashuk A.S., Vilkov O.Yu., Gorgoi M., Pavlychev A.A., J. Appl. Phys., 113 (2013), 224301.10.1063/1.4809978Search in Google Scholar