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Journal of Electrical Engineering
Volume 62 (2011): Issue 6 (November 2011)
Open Access
Some Aspects of Quantitative Analysis of Ternary Alloys of Group III-Nitrides by Auger Electron Spectroscopy
Jozef Liday
Jozef Liday
,
Peter Vogrinčič
Peter Vogrinčič
and
Gernod Ecke
Gernod Ecke
| Dec 21, 2011
Journal of Electrical Engineering
Volume 62 (2011): Issue 6 (November 2011)
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Published Online:
Dec 21, 2011
Page range:
367 - 369
DOI:
https://doi.org/10.2478/v10187-011-0059-2
Keywords
GaN
,
AlN
,
AlGaN
,
AES relative elemental sensitivity factors
,
component sputtering yields
This content is open access.
Jozef Liday
Institute of Electronics and Photonics, Slovak University of Technology, Ilkovičova 3, 812 19 Bratislava, Slovakia
Peter Vogrinčič
Institute of Electronics and Photonics, Slovak University of Technology, Ilkovičova 3, 812 19 Bratislava, Slovakia
Gernod Ecke
Centre for Micro- and Nanotechnologies, Technical University of Ilmenau, Gustav Kirchhoff-Str. 7, D-98693 Ilmenau, Germany