Some Aspects of Quantitative Analysis of Ternary Alloys of Group III-Nitrides by Auger Electron Spectroscopy

SEAH, M. P.: Quantification in AES and XPS, In: Practical Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy (D. Briggs and M.P. Seah, eds.), Wiley, Chichester, 1990.Search in Google Scholar

LIDAY, J.—HOFMANN, S.—HARMAN, R.: Quantitative Auger Electron Analysis of Homogeneous Binary Alloys of Cr, Fe and Ni, Vacuum 43 (1992), 331-339.10.1016/0042-207X(92)90166-TSearch in Google Scholar

HOFMANN, S.: Compositional Depth Profiling by Sputtering, Prog. Surf. Sci. 36 (1991), 35-87.10.1016/0079-6816(91)90013-TSearch in Google Scholar

GNASER, H.: Low-Energy Ion Irradiation of Solid Surfaces, Series: Springer Tracts in Modern Physics, vol. 146, Springer, Berlin, 1999.Search in Google Scholar

TOUGARD, S.: Quantification of Nanostructures by Electron Spectroscopy, In: Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (D. Briggs and J.T. Grant, eds.), IM Publications, Chichester, 2003.Search in Google Scholar

LIDAY, J.—ECKE, G.—BAUMANN, T.—VOGRINČIČ, P.—BREZA, J.: Contribution to the Quantitative Analysis of Ternary Alloys of Group III Nitrides by Auger Spectroscopy, J. Electrical Eng. 61 (2010), 62-64.10.2478/v10187-010-0009-4Search in Google Scholar

ZE-JUN, D.—SHIMIZU, R.: Surface analysis by Auger and X-Ray Photoelectron Spectroscopy, IM Publications 61 (2003), 587-618.Search in Google Scholar

SHIMIZU, R.: Quantitative Analysis by Auger Electron Spectroscopy, Jpn. J. Appl. Phys. 22 (1983), 1631-1642.10.1143/JJAP.22.1631Search in Google Scholar

TANUMA, S.—POWELL, C. J.—PENN, D. R.: Calculation of Electron Inelastic Mean Free Paths II. Data for 27 Elements over the 502000 eV Range, Surf. Interface Anal. 17 (1991), 911-926.10.1002/sia.740171304Search in Google Scholar

JABLONSKI, A.: Remarks on the Definition of the Backscattering Factor in AES, Surf. Sci. 499 (2002), 219-228.10.1016/S0039-6028(01)01851-9Search in Google Scholar

SHIMIZU, H.—ONO, M.—NAKAYAMA, K.: Quantitative Auger Analysis of Copper-Nickel Alloy Surfaces After Argon Ion Bombardment, Surf. Sci. 36 (1973), 817-821.10.1016/0039-6028(73)90428-7Search in Google Scholar