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Gadolinium Scandate: Next Candidate for Alternative Gate Dielectric in CMOS Technology?


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ZHAO, C.—WITTERS, T.—BRIJS, B.—BENDER, H.—RICHARD, O.—CAYMAX, M.—HEEG, T—SCHUBERT, J.—AFANASEV, V. V.—STESMANS, A.—SCHLOM, D.: Ternary Rare-Earth Metal Oxide High-κ Layers on Silicon Dioxide, Appl. Phys. Lett 86 (2005), 132903.10.1063/1.1886249Search in Google Scholar

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ISSN:
1335-3632
Language:
English
Publication timeframe:
6 times per year
Journal Subjects:
Engineering, Introductions and Overviews, other