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Journals
Journal of Electrical Engineering
Volume 62 (2011): Issue 1 (January 2011)
Open Access
Gadolinium Scandate: Next Candidate for Alternative Gate Dielectric in CMOS Technology?
Karol Fröhlich
Karol Fröhlich
,
Ján Fedor
Ján Fedor
,
Ivan Kostič
Ivan Kostič
,
Ján Maňka
Ján Maňka
and
Peter Ballo
Peter Ballo
| Jun 07, 2011
Journal of Electrical Engineering
Volume 62 (2011): Issue 1 (January 2011)
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Published Online:
Jun 07, 2011
Page range:
54 - 56
DOI:
https://doi.org/10.2478/v10187-011-0009-z
Keywords
CMOS technology
,
gate dielectric
,
high-κ
,
X-ray diffraction
,
X-ray reflectivity
This content is open access.
Karol Fröhlich
Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava
Ján Fedor
Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava
Ivan Kostič
Institute of Informatics, Institute of Measurement Science, Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava
Ján Maňka
Slovak Academy of Sciences, Dúbravská cesta 9, 841 04 Bratislava
Peter Ballo
Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Ilkovičova 3, 812 19 Bratislava, Slovakia