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Measurement Science Review
Volume 18 (2018): Issue 6 (October 2018)
Open Access
Electrostatic Force Microscopy Measurement System for Micro-topography of Non-conductive Devices
Gaofa He
Gaofa He
,
Jie Meng
Jie Meng
,
Renbing Tan
Renbing Tan
and
Peng Zhong
Peng Zhong
| Nov 30, 2018
Measurement Science Review
Volume 18 (2018): Issue 6 (October 2018)
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Published Online:
Nov 30, 2018
Page range:
256 - 261
Received:
Jul 19, 2018
Accepted:
Nov 05, 2018
DOI:
https://doi.org/10.1515/msr-2018-0035
Keywords
Electrostatic force microscopy
,
surface morphology
,
precise measurement
,
scanning probe microscopy
© 2018 Gaofa He et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Gaofa He
School of Mechanical and Power Engineering Chongqing University of Science and Technology
Chongqing, China
Jie Meng
School of Mechanical and Power Engineering Chongqing University of Science and Technology
Chongqing, China
Renbing Tan
School of Mathematics and Physics Chongqing University of Science and Technology
Chongqing, China
Peng Zhong
School of Mechanical and Power Engineering Chongqing University of Science and Technology
Chongqing, China