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Measurement Science Review
Volume 15 (2015): Issue 5 (October 2015)
Open Access
Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness
Q. Liang
Q. Liang
,
W. Wu
W. Wu
,
D. Zhang
D. Zhang
,
B. Wei
B. Wei
,
W. Sun
W. Sun
,
Y. Wang
Y. Wang
and
Y. Ge
Y. Ge
| Oct 29, 2015
Measurement Science Review
Volume 15 (2015): Issue 5 (October 2015)
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Published Online:
Oct 29, 2015
Page range:
248 - 255
Received:
Feb 04, 2015
Accepted:
Sep 30, 2015
DOI:
https://doi.org/10.1515/msr-2015-0034
Keywords
Surface roughness metrology
,
multi-component force sensor
,
Finite element analysis
© by Q. Liang
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.