<abstract xmlns="http://www.w3.org/1999/xhtml"><p> Roughness, which can represent the trade-off between manufacturing cost and performance of mechanical components, is a critical predictor of cracks, corrosion and fatigue damage. In order to measure polished or super-finished surfaces, a novel touch probe based on three-component force sensor for characterizing and quantifying surface roughness is proposed by using silicon micromachining technology. The sensor design is based on a cross-beam structure, which ensures that the system possesses high sensitivity and low coupling. The results show that the proposed sensor possesses high sensitivity, low coupling error, and temperature compensation function. The proposed system can be used to investigate micromechanical structures with nanometer accuracy.</p></abstract>

Roughness, which can represent the trade-off between manufacturing cost and performance of mechanical components, is a critical predictor of cracks, corrosion and fatigue damage. In order to measure polished or super-finished surfaces, a novel touch probe based on three-component force sensor for characterizing and quantifying surface roughness is proposed by using silicon micromachining technology. The sensor design is based on a cross-beam structure, which ensures that the system possesses high sensitivity and low coupling. The results show that the proposed sensor possesses high sensitivity, low coupling error, and temperature compensation function. The proposed system can be used to investigate micromechanical structures with nanometer accuracy.

Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

College of Electrical and Information Engineering, Hunan University, Changsha, Hunan, 410082, China

Faculty of Engineering and Applied Science, University of Ontario Institute of Technology, Oshawa, ON L1H 7K4, Canada

State Key Laboratories of Transducer Technology, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei, Anhui 230031, China

Measurement Science Review

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Roughness, which can represent the trade-off between manufacturing cost and performance of mechanical components, is a critical predictor of cracks, corrosion...

Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

Data publikacji: 29 paź 2015

Zakres stron: 248 - 255

Otrzymano: 04 lut 2015

Przyjęty: 30 wrz 2015

DOI: https://doi.org/10.1515/msr-2015-0034

Słowa kluczowe
Surface roughness metrology, multi-component force sensor, Finite element analysis

© by Q. Liang

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

Data publikacji: 29 paź 2015

Zakres stron: 248 - 255

Otrzymano: 04 lut 2015

Przyjęty: 30 wrz 2015

DOI: https://doi.org/10.1515/msr-2015-0034

Słowa kluczoweSurface roughness metrology, multi-component force sensor, Finite element analysis

© by Q. Liang

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Słowa kluczowe
Surface roughness metrology, multi-component force sensor, Finite element analysis