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Measurement Science Review
Volume 15 (2015): Issue 5 (October 2015)
Open Access
Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness
Q. Liang
Q. Liang
,
W. Wu
W. Wu
,
D. Zhang
D. Zhang
,
B. Wei
B. Wei
,
W. Sun
W. Sun
,
Y. Wang
Y. Wang
and
Y. Ge
Y. Ge
| Oct 29, 2015
Measurement Science Review
Volume 15 (2015): Issue 5 (October 2015)
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Published Online:
Oct 29, 2015
Page range:
248 - 255
Received:
Feb 04, 2015
Accepted:
Sep 30, 2015
DOI:
https://doi.org/10.1515/msr-2015-0034
Keywords
Surface roughness metrology
,
multi-component force sensor
,
Finite element analysis
© by Q. Liang
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
Q. Liang
College of Electrical and Information Engineering, Hunan University, Changsha, Hunan, 410082, China
W. Wu
College of Electrical and Information Engineering, Hunan University, Changsha, Hunan, 410082, China
D. Zhang
Faculty of Engineering and Applied Science, University of Ontario Institute of Technology, Oshawa, ON L1H 7K4, Canada
B. Wei
Faculty of Engineering and Applied Science, University of Ontario Institute of Technology, Oshawa, ON L1H 7K4, Canada
W. Sun
College of Electrical and Information Engineering, Hunan University, Changsha, Hunan, 410082, China
Y. Wang
College of Electrical and Information Engineering, Hunan University, Changsha, Hunan, 410082, China
Y. Ge
State Key Laboratories of Transducer Technology, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei, Anhui 230031, China