<abstract xmlns="http://www.w3.org/1999/xhtml"><p> Recent demand on the measurement resolution of precise positioning comes up to tens of picometers. Some distinguished researches have been performed to measure the displacement in picometer order, however, few of them can verify the measurement performance as available tools in industry. This is not only because the picometer displacement is not yet required for industrial use, but also due to the lack of standard tools to verify such precise displacement. We proposed a displacement reduction mechanism for generating precise displacement using torsional leaf spring hinges (TLSHs) that consist of four leaf springs arranged radially. It has been demonstrated that a prototype of the reduction mechanism was able to provide one-nanometer displacement with 1/1000 reduction rate by a piezoelectric actuator. In order to clarify the potential of the reduction mechanism, a displacement reduction table that can be mounted on AFM stage was newly developed using TLSHs. This paper describes the design of the reduction mechanism and the sub-nanometer displacement performance of the table obtained from its dynamic and static characteristics measured by displacement sensors and from the AFM images</p></abstract>

Recent demand on the measurement resolution of precise positioning comes up to tens of picometers. Some distinguished researches have been performed to measure the displacement in picometer order, however, few of them can verify the measurement performance as available tools in industry. This is not only because the picometer displacement is not yet required for industrial use, but also due to the lack of standard tools to verify such precise displacement. We proposed a displacement reduction mechanism for generating precise displacement using torsional leaf spring hinges (TLSHs) that consist of four leaf springs arranged radially. It has been demonstrated that a prototype of the reduction mechanism was able to provide one-nanometer displacement with 1/1000 reduction rate by a piezoelectric actuator. In order to clarify the potential of the reduction mechanism, a displacement reduction table that can be mounted on AFM stage was newly developed using TLSHs. This paper describes the design of the reduction mechanism and the sub-nanometer displacement performance of the table obtained from its dynamic and static characteristics measured by displacement sensors and from the AFM images

Generating Sub-nanometer Displacement Using Reduction Mechanism Consisting of Torsional Leaf Spring Hinges

Graduate School of Science and Technology, Hirosaki University, 3 Bunkyo-cho, Hirosaki-city, Aomori Pref. 036-8561, Japan

Measurement Science Review

Recent demand on the measurement resolution of precise positioning comes up to tens of picometers. Some distinguished researches have been performed to measure...

Generating Sub-nanometer Displacement Using Reduction Mechanism Consisting of Torsional Leaf Spring Hinges

Data publikacji: 06 mar 2014

Zakres stron: 48 - 51

DOI: https://doi.org/10.2478/msr-2014-0008

Słowa kluczowe
Sub-nanometer displacement, reduction mechanism, torsional leaf spring hinge, displacement standard, AFM verification

This content is open access.

Generating Sub-nanometer Displacement Using Reduction Mechanism Consisting of Torsional Leaf Spring Hinges

Data publikacji: 06 mar 2014

Zakres stron: 48 - 51

DOI: https://doi.org/10.2478/msr-2014-0008

Słowa kluczoweSub-nanometer displacement, reduction mechanism, torsional leaf spring hinge, displacement standard, AFM verification

This content is open access.

Słowa kluczowe
Sub-nanometer displacement, reduction mechanism, torsional leaf spring hinge, displacement standard, AFM verification