<abstract xmlns="http://www.w3.org/1999/xhtml">The growth of AlN layers on glass substrates using magnetron sputtering method was performed and the grown layers were subjected to optical measurements. Transmission spectra of the layers grown at different content of N2 in the atmosphere were obtained. The transmission spectra as well as energy gap depended on N2 content. The annealing of the layers in air led to transmission changes and influenced energy gap and refractive index values.</abstract>

The growth of AlN layers on glass substrates using magnetron sputtering method was performed and the grown layers were subjected to optical measurements. Transmission spectra of the layers grown at different content of N2 in the atmosphere were obtained. The transmission spectra as well as energy gap depended on N2 content. The annealing of the layers in air led to transmission changes and influenced energy gap and refractive index values.

Optical properties of AlN layers obtained by magnetron sputtering

Faculty of Mathematics and Natural Sciences

Materials Science-Poland

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

{"article-title":"Optical properties of AlN layers obtained by magnetron sputtering"}

The growth of AlN layers on glass substrates using magnetron sputtering method was performed and the grown layers were subjected to optical measurements....

Optical properties of AlN layers obtained by magnetron sputtering

Online veröffentlicht: 01. Feb. 2019

Seitenbereich: 717 - 721

Eingereicht: 29. Dez. 2017

Akzeptiert: 22. März 2018

DOI: https://doi.org/10.2478/msp-2018-0087

Schlüsselwörter
optical properties, thin films, AlN

© 2018 Piotr Potera et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Optical properties of AlN layers obtained by magnetron sputtering

Online veröffentlicht: 01. Feb. 2019

Seitenbereich: 717 - 721

Eingereicht: 29. Dez. 2017

Akzeptiert: 22. März 2018

DOI: https://doi.org/10.2478/msp-2018-0087

Schlüsselwörteroptical properties, thin films, AlN

© 2018 Piotr Potera et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Schlüsselwörter
optical properties, thin films, AlN