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Materials Science-Poland
Volume 36 (2018): Issue 4 (December 2018)
Open Access
Optical properties of AlN layers obtained by magnetron sputtering
Piotr Potera
Piotr Potera
,
Grzegorz Wisz
Grzegorz Wisz
and
Łukasz Szyller
Łukasz Szyller
| Feb 01, 2019
Materials Science-Poland
Volume 36 (2018): Issue 4 (December 2018)
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Published Online:
Feb 01, 2019
Page range:
717 - 721
Received:
Dec 29, 2017
Accepted:
Mar 22, 2018
DOI:
https://doi.org/10.2478/msp-2018-0087
Keywords
optical properties
,
thin films
,
AlN
© 2018 Piotr Potera et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
Piotr Potera
Faculty of Mathematics and Natural Sciences, University of Rzeszow
Rzeszow, Poland
Grzegorz Wisz
Faculty of Mathematics and Natural Sciences, University of Rzeszow
Rzeszow, Poland
Łukasz Szyller
Faculty of Mathematics and Natural Sciences, University of Rzeszow
Rzeszow, Poland