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Journals
Journal of Electrical Engineering
Volume 61 (2010): Issue 6 (November 2010)
Open Access
Structural Evolution of Sputtered Indium Oxide Thin Films
Ivan Hotový
Ivan Hotový
,
Thomas Kups
Thomas Kups
,
Juraj Hotový
Juraj Hotový
,
Jozef Liday
Jozef Liday
,
Dalibor Búc
Dalibor Búc
,
Mária Čaplovičová
Mária Čaplovičová
,
Vlastimil Řeháček
Vlastimil Řeháček
,
Helmut Sitter
Helmut Sitter
,
Clemens Simbrunner
Clemens Simbrunner
,
Alberta Bonnani
Alberta Bonnani
and
Lothar Spiess
Lothar Spiess
| Jun 07, 2011
Journal of Electrical Engineering
Volume 61 (2010): Issue 6 (November 2010)
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Published Online:
Jun 07, 2011
Page range:
382 - 385
DOI:
https://doi.org/10.2478/v10187-010-0059-7
Keywords
InO thin films
,
dc magnetron sputtering
,
structure
,
cubic indium oxide
,
rhombohedral indium oxide
This content is open access.