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Journals
Journal of Electrical Engineering
Volume 61 (2010): Issue 6 (November 2010)
Open Access
Ohmic contacts to p-GaN Using Au/Ni-Mg-O Metallization
Jozef Liday
Jozef Liday
,
Peter Vogrinčič
Peter Vogrinčič
,
Ivan Hotový
Ivan Hotový
,
Alberta Bonanni
Alberta Bonanni
,
Helmut Sitter
Helmut Sitter
,
Tibor Lalinský
Tibor Lalinský
,
Gabriel Vanko
Gabriel Vanko
,
Vlastimil Řeháček
Vlastimil Řeháček
,
Juraj Breza
Juraj Breza
and
Gernot Ecke
Gernot Ecke
| Jun 07, 2011
Journal of Electrical Engineering
Volume 61 (2010): Issue 6 (November 2010)
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Published Online:
Jun 07, 2011
Page range:
378 - 381
DOI:
https://doi.org/10.2478/v10187-010-0058-8
Keywords
p-GaN
,
Au/Ni-Mg-O/p-GaN contact structure
,
AES depth profiling
,
low resistance ohmic contact
This content is open access.
Jozef Liday
Department of Microelectronics, Slovak University of Technology, Ilkovičova 3, 812 19 Bratislava, Slovakia
Peter Vogrinčič
Department of Microelectronics, Slovak University of Technology, Ilkovičova 3, 812 19 Bratislava, Slovakia
Ivan Hotový
Department of Microelectronics, Slovak University of Technology, Ilkovičova 3, 812 19 Bratislava, Slovakia
Alberta Bonanni
Institute of Semiconductor and Solid State Physics, Johannes Kepler University, Altenbergerstr. 69, A-4040 Linz, Austria
Helmut Sitter
Institute of Semiconductor and Solid State Physics, Johannes Kepler University, Altenbergerstr. 69, A-4040 Linz, Austria
Tibor Lalinský
Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9,841 04 Bratislava, Slovakia
Gabriel Vanko
Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9,841 04 Bratislava, Slovakia
Vlastimil Řeháček
Department of Microelectronics, Slovak University of Technology, Ilkovičova 3, 812 19 Bratislava, Slovakia
Juraj Breza
Department of Microelectronics, Slovak University of Technology, Ilkovičova 3, 812 19 Bratislava, Slovakia
Gernot Ecke
Center of Micro- and Nanotechnologies, Technical University of Ilmenau, Gustav Kirchhoffstr. 7, D-986 93 Ilmenau, Germany