<abstract xml:lang="en" xmlns="http://www.w3.org/1999/xhtml"><p>Microstructural properties of Ce1-x
                        GdxO2-δ (x = 0 to 0.3) thin films prepared by pulsed laser deposition technique were studied. The thin films were deposited on Si(100) substrate at a substrate temperature of 973 K at the oxygen partial pressure of 0.2 Pa using KrF excimer laser with energy of 220 mJ. The prepared thin films were characterized by X-ray diffraction, Raman spectroscopy and atomic force microscopy. X-ray diffraction analysis confirmed the polycrystalline nature of the thin films. Crystallite size, strain and dislocation density were calculated. The Raman studies revealed the formation of Ce-O with the systematic variation of peak intensity and full width half maxima depending on concentration of gadolinium dopant. The thickness of the films was estimated using Talystep profiler. The surface roughness was estiamted based on AFM.</p></abstract>

Microstructural properties of Ce1-x
                        GdxO2-δ (x = 0 to 0.3) thin films prepared by pulsed laser deposition technique were studied. The thin films were deposited on Si(100) substrate at a substrate temperature of 973 K at the oxygen partial pressure of 0.2 Pa using KrF excimer laser with energy of 220 mJ. The prepared thin films were characterized by X-ray diffraction, Raman spectroscopy and atomic force microscopy. X-ray diffraction analysis confirmed the polycrystalline nature of the thin films. Crystallite size, strain and dislocation density were calculated. The Raman studies revealed the formation of Ce-O with the systematic variation of peak intensity and full width half maxima depending on concentration of gadolinium dopant. The thickness of the films was estimated using Talystep profiler. The surface roughness was estiamted based on AFM.

Preparation and microstructural characterization of Si(100) Ce1−x
                     GdxO2−δ
                      thin films prepared by pulsed laser deposition technique

Department of Physics, Osmania University, Hyderabad, India

Materials Science-Poland

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Microstructural properties of Ce1-x
                        GdxO2-δ (x = 0 to 0.3) thin films prepared by pulsed laser deposition technique were studied. The...

Preparation and microstructural characterization of Si(100) Ce1−x GdxO2−δ thin films prepared by pulsed laser deposition technique

Published Online: Dec 19, 2014

Page range: 541 - 546

DOI: https://doi.org/10.2478/s13536-014-0246-5

Keywords
cerium oxide, dislocation densities, gadolinium doped cerium oxide, microstructure, pulsed laser deposition, thin films

© 2014 Wroclaw University of Technology

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Preparation and microstructural characterization of Si(100) Ce1−x GdxO2−δ thin films prepared by pulsed laser deposition technique

Published Online: Dec 19, 2014

Page range: 541 - 546

DOI: https://doi.org/10.2478/s13536-014-0246-5

Keywordscerium oxide, dislocation densities, gadolinium doped cerium oxide, microstructure, pulsed laser deposition, thin films

© 2014 Wroclaw University of Technology

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Keywords
cerium oxide, dislocation densities, gadolinium doped cerium oxide, microstructure, pulsed laser deposition, thin films