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Materials Science-Poland
Volume 32 (2014): Issue 2 (June 2014)
Open Access
Optimization of gas injection conditions during deposition of AlN layers by novel reactive GIMS method
Krzysztof Zdunek
Krzysztof Zdunek
,
Katarzyna Nowakowska-Langier
Katarzyna Nowakowska-Langier
,
Rafal Chodun
Rafal Chodun
,
Jerzy Dora
Jerzy Dora
,
Sebastian Okrasa
Sebastian Okrasa
and
Ewa Talik
Ewa Talik
| Jul 22, 2014
Materials Science-Poland
Volume 32 (2014): Issue 2 (June 2014)
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Published Online:
Jul 22, 2014
Page range:
171 - 175
DOI:
https://doi.org/10.2478/s13536-013-0169-6
Keywords
plasma surface engineering
,
magnetron sputtering
,
aluminum nitride deposition
© 2013 Wroclaw University of Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.