Methods of optimization of reactive sputtering conditions of Al target during AlN films deposition

[1] Guo Q., Yoshida A., Jpn. J. Appl. Phys., 33 (1994), 2453.10.1143/JJAP.33.2453Search in Google Scholar

[2] Teisseyre H., Perlin P., Suski T., Grzegory I., Porowski S., Jun J., Pietraszko A., Moustakas T.D., J. Appl. Phys., 76 (1994), 2429.10.1063/1.357592Search in Google Scholar

[3] Yamashita H., Fukui K., Misawa S., Yoshida S., J. Appl. Phys., 50 (1979), 896.10.1063/1.326007Search in Google Scholar

[4] Slack G.A., Tanzilli R.A., Pohl R.O., Vandersande J.W., J. Phys. Chem. Solids, 48 (1987), 641.10.1016/0022-3697(87)90153-3Search in Google Scholar

[5] Chiu K.H., Chen J.H., Chen H.R., Huang R.S., Thin Solid Films, 515 (2007), 4819.10.1016/j.tsf.2006.12.181Search in Google Scholar

[6] Yang R.Y., Hsiung C.M., Chen H.H., Wu H.W., Shih M.C., Microw. Optic. Tech. Lett., 50 (2008), 2863.10.1002/mop.23796Search in Google Scholar

[7] Bose S., Mazumder S.K., Solid State Electron., 62 (2011), 5.10.1016/j.sse.2011.03.008Search in Google Scholar

[8] Kelekci O., Tasli P., Cetin S., Kasap M., Ozcelik S., Ozbay E., Curr. Appl. Phys., 12 (2012), 1600.10.1016/j.cap.2012.05.040Search in Google Scholar

[9] Doyennette L., Vardi A., Guillot F., Nevou L., Tchernycheva M., Lupu A., Colombelli R., Bahir G., Monroy E., Julien F.H., Superlattice. Microst., 40 (2006), 262.10.1016/j.spmi.2006.09.017Search in Google Scholar

[10] Yu C.L., Chang S.J., Chang P.C., Lin Y.C., Lee C.T., Superlattice. Microst., 40 (2006), 470.10.1016/j.spmi.2006.09.011Search in Google Scholar

[11] Iborra E., Olivares J., Clement M., Vergara L., Sanz-Hervás A., Sangrador J., Sensor. Actuat. A-Phys., 115 (2004), 501.10.1016/j.sna.2004.03.053Search in Google Scholar

[12] Belyanin A.F., Bouilov L.L., Zhirnov V.V., Kamenev A.I., Kovalskij K.A., Spitsyn B.V., Diam. Relat. Mater., 8 (1999), 36910.1016/S0925-9635(98)00412-9Search in Google Scholar

[13] Vacandio F., Massiani Y., Gravier P., Rossi S., Bonora P.L., Fedrizzi L., Electrochim. Acta, 46 (2001), 3827.10.1016/S0013-4686(01)00669-7Search in Google Scholar

[14] Altun H., Sen S., Surf. Coat. Tech., 197 (2005), 193.10.1016/j.surfcoat.2004.06.001Search in Google Scholar

[15] Vissutipitukul P., Aizawa T., Wear, 259 (2005), 482.10.1016/j.wear.2005.02.119Search in Google Scholar

[16] Yao S.H., Su Y.L., Kao W.H., Liu T.H., Tribol. Int., 39 (2006), 332.10.1016/j.triboint.2005.02.015Search in Google Scholar

[17] Qiu J.Y., Hotta Y., Watari K., Mitsuishi K., Yamazaki M., J. Eur. Ceram. Soc., 26 (2006), 385.10.1016/j.jeurceramsoc.2005.06.016Search in Google Scholar

[18] Fischer R.A., Miehr A., Ambacher O., Metzger T., Born E., J. Cryst. Growth, 170 (1997), 139.10.1016/S0022-0248(96)00532-5Search in Google Scholar

[19] Tanaka Z., Hasebe Z., Inushima T., Sandhu A., Ohoya S., J. Cryst. Growth, 209 (2000), 410.10.1016/S0022-0248(99)00581-3Search in Google Scholar

[20] Dimitrova V., Manova D., Paskova T., Uzunov T., Ivanov N., Dechev D., Vacuum, 51 (1998), 161.10.1016/S0042-207X(98)00150-XSearch in Google Scholar

[21] Manova D., Dimitrova V., Fukarek W., Karpuzov D., Surf. Coat. Tech., 106 (1998), 205.10.1016/S0257-8972(98)00527-1Search in Google Scholar

[22] Posadowski W. M., Wiatrowski A., Dora J., Radzimski Z.J., Thin Solid Films, 516 (2008), 4478.10.1016/j.tsf.2007.05.077Search in Google Scholar

[23] Krówka K., Wiatrowski A., Posadowski W.M., Thin Solid Films, 520 (2012), 4127.10.1016/j.tsf.2011.04.068Search in Google Scholar

[24] Kramida A., Ralchenko YU., Reader J., NIST ASD TEAM (2014), NIST Atomic Spectra Database (version 5.2), http://physics.nist.gov/asd, National Institute of Standards and Technology, Gaithersburg, MD, 2014.Search in Google Scholar

[25] Manjon F.J., Errandonea D., Romero A. H., Garro N., Serrano J., Kuball M., Phys. Rev. B, 77 (2008), 205204.10.1103/PhysRevB.77.205204Search in Google Scholar

[26] Guillaumot A., Lapostolle F., Dublanche-Tixier C., Oliveira J.C., Billard A., Langlade C., Vacuum, 85 (2010), 120.10.1016/j.vacuum.2010.04.012Search in Google Scholar

[27] Brudnik A., Czapla A., Kusior E., Thin Solid Films 478 (2005), 6.10.1016/j.tsf.2004.10.004Search in Google Scholar