Status of Ion Beam Modification and Analysis of Materials at STU MTF

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Abstract

The new Ion Beam Centre (IBC) equipped with 6 MV tandem ion accelerator and 500 kV ion implanter systems was built at the Slovak University of Technology, Faculty of Materials Science and Technology (STU MTF). The facility provides Ion Beam Modification of Materials (IBMM) and Ion Beam Analysis (IBA), which includes Rutherford Backscattering Spectrometry (RBS), Particle Induced X-ray Analysis (PIXE), Elastic Recoil Spectrometry (ERDA) and Nuclear Reaction Analysis (NRA). Presented are selected experimental procedures carried out in the IBC during the first year of operation. They present examples of a typical IBA performed, such as thin film characterisation in nm to tens of µm range, elemental depth profiles and sensitivity to the light elements enhancement by non-Rutherford cross-section regime application along with the crystalline sample channelling spectra and boron content measurement.

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  • 1. A. ZUCCHIATTI A. REDONDO-CUBERO. 2014. Nucl. Instr. Meth. B 331 48.

  • 2. P. KOVÁČ P. M. PAVLOVIČ and J. DOBROVODSKÝ. 1994. A 0.9-MV Accelerator for Materials Research at the STU Bratislava. Nucl. Instr. Meth. Phys. Res. B 85 749.

  • 3. INSTRUMENTATION FOR PIXE AND RBS IAEA IAEA-TECDOC-1190 VIENNA 2000.

  • 4. P. NOGA J. DOBROVODSKÝ D. VAŇA M. BEŇO A. ZÁVACKÁ M. MUŠKA R. HALGAŠ S. MINÁRIK R. RIEDLMAJER. 2017. Nucl. Instr. Meth. Phys. Res. B 409 264 https://doi.org/10.1016/j.nimb.2017.04.051

  • 5. M. NASTASI J.W. MAYER Y. WANG. 2014. Ion Beam Analysis – Fundamental and Applications CRC Press.

  • 6. A. VANTOMME. 2016. “50 years of ion channeling in materials science”. Nucl. Instr. Meth. B 371 pp. 12-26.

  • 7. J. DOBROVODSKÝ M. BEŇO D. VAŇA P. BEZÁK P. NOGA. 2018. The first year operation experience with Ion Beam Analysis at the new STU. Nucl. Instr. Meth. Phys. Res. B. https://doi.org/10.1016/j.nimb.2018.10.006

  • 8. SIMNRA home page http://home.mpcdf.mpg.de/~mam/.

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