<abstract xmlns="http://www.w3.org/1999/xhtml"><p>The new Ion Beam Centre (IBC) equipped with 6 MV tandem ion accelerator and 500 kV ion implanter systems was built at the Slovak University of Technology, Faculty of Materials Science and Technology <bold>(</bold>STU MTF). The facility provides Ion Beam Modification of Materials (IBMM) and Ion Beam Analysis (IBA), which includes Rutherford Backscattering Spectrometry (RBS), Particle Induced X-ray Analysis (PIXE), Elastic Recoil Spectrometry (ERDA) and Nuclear Reaction Analysis (NRA). Presented are selected experimental procedures carried out in the IBC during the first year of operation. They present examples of a typical IBA performed, such as thin film characterisation in nm to tens of µm range, elemental depth profiles and sensitivity to the light elements enhancement by non-Rutherford cross-section regime application along with the crystalline sample channelling spectra and boron content measurement.</p></abstract>

The new Ion Beam Centre (IBC) equipped with 6 MV tandem ion accelerator and 500 kV ion implanter systems was built at the Slovak University of Technology, Faculty of Materials Science and Technology (STU MTF). The facility provides Ion Beam Modification of Materials (IBMM) and Ion Beam Analysis (IBA), which includes Rutherford Backscattering Spectrometry (RBS), Particle Induced X-ray Analysis (PIXE), Elastic Recoil Spectrometry (ERDA) and Nuclear Reaction Analysis (NRA). Presented are selected experimental procedures carried out in the IBC during the first year of operation. They present examples of a typical IBA performed, such as thin film characterisation in nm to tens of µm range, elemental depth profiles and sensitivity to the light elements enhancement by non-Rutherford cross-section regime application along with the crystalline sample channelling spectra and boron content measurement.

Status of Ion Beam Modification and Analysis of Materials at STU MTF

Slovak University Of Technology In Bratislava

Faculty Of Materials Science And Technology In Trnava, Advanced Technologies Research Institute

Research Papers Faculty of Materials Science and Technology Slovak University of Technology

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

{"article-title":"Status of Ion Beam Modification and Analysis of Materials at STU MTF"}

The new Ion Beam Centre (IBC) equipped with 6 MV tandem ion accelerator and 500 kV ion implanter systems was built at the Slovak University of Technology,...

Status of Ion Beam Modification and Analysis of Materials at STU MTF

Published Online: Feb 23, 2019

Page range: 9 - 16

Received: Jun 04, 2018

Accepted: Jan 21, 2019

DOI: https://doi.org/10.2478/rput-2018-0025

Keywords
Ion Beam Modification, Ion Beam Analysis, ion implantation, RBS, PIXE, NRA, ERDA, channeling

© 2018 Jozef Dobrovodský et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Status of Ion Beam Modification and Analysis of Materials at STU MTF

Published Online: Feb 23, 2019

Page range: 9 - 16

Received: Jun 04, 2018

Accepted: Jan 21, 2019

DOI: https://doi.org/10.2478/rput-2018-0025

KeywordsIon Beam Modification, Ion Beam Analysis, ion implantation, RBS, PIXE, NRA, ERDA, channeling

© 2018 Jozef Dobrovodský et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Keywords
Ion Beam Modification, Ion Beam Analysis, ion implantation, RBS, PIXE, NRA, ERDA, channeling