Micro Fluxgate Sensor using Solenoid Coils Fabricated by MEMS Technology

Open access

In this paper, we present a micro fluxgate sensor with solenoid coils. Micro-solenoid coils were used in this fluxgate sensor as excitation and sensing elements. Two identical excitation coils in inverse series were wound around the opposite sides of the rectangular-ring-shaped magnetic core, respectively. The sensing coil was placed vertically to the excitation coils and between them. Adopting gluing and chemical wet etching, iron-based nanocrystalline alloy was used as magnetic core material. This fluxgate sensor was designed to operate based on second harmonic operation principle. 100 kHz excitation currents with different effective values were selected to characterize the fabricated fluxgate sensor. From these experiments, we obtained some results from which we found out that the greatest sensitivity of 583.1 V/T was achieved with the effective excitation current of 150 mA. In the range from -500 μT to +500 μT, the fabricated fluxgate sensor can keep a good linearity. The noise power density was 13.57 nT/Hz0.5 at 1Hz and the noise RMS level was 23 nT in the frequency range of 10 mHz-25 Hz.

[1] Liakopoulos, T.M., Ahn, C.H. (1999). A microfluxgate magnetic sensor using micromachined planar solenoid coils. Sensors and Actuators A: Physical, 77, 66-72.

[2] Primdahl, F. (1979). The fluxgate magnetometer. Journal of Physics E: Scientific Instruments, 12, 241-253.

[3] Lenz, J.E. (1990). A review of magnetic sensors. Proceedings of the IEEE, 78 (6), 973-989.

[4] Ripka, P. (2000). New directions in fluxgate sensors. Journal of Magnetism and Magnetic Materials, 215- 216, 735-739.

[5] Popovic, R.S., Flanagan, J.A., Besse, P.A. (1996). The future of magnetic sensors. Sensors and Actuators A:Physical, 56, 799-802.

[6] Ripka, P. (2003). Advances in fluxgate sensors. Sensors and Actuators A: Physical, 106, 8-14.

[7] Acuna, M.H. (2002). Space-based magnetometers. Review of Scientific Instruments, 73 (11), 3717-3736.

[8] Kejik, P., Chiesi, L., Janossy, B., Popovic, R.S. (2000). A new compact 2D planar fluxgate sensor with amorphous metal core. Sensors and Actuators A:Physical, 81, 181-183.

[9] Zorlu, O., Kejik, P., Popovic, R.S. (2007). An orthogonal fluxgate-type magnetic microsensor with electroplated permalloy core. Sensors and ActuatorsA: Physical, 135, 43-49.

[10] Kawahito, S., Satoh, H., Sutoh, M., Todokoro, Y. (1996). High resolution micro fluxgate sensing elements using closely coupled coils structures. Sensors and Actuators A: Physical, 54, 612-617.

[11] Koch, R.H., Rozen, J.R. (2001). Low-noise flux-gate magnetic-filed sensors using ring- and rod-core geometries. Applied Physics Letters, 78, 1897-1899.

[12] Laurinavičius, L. (2011). Helicon resonator based strong magnetic field sensor. Measurement ScienceReview, 11, 149-153.

Measurement Science Review

The Journal of Institute of Measurement Science of Slovak Academy of Sciences

Journal Information

IMPACT FACTOR 2017: 1.345
5-year IMPACT FACTOR: 1.253

CiteScore 2016: 1.88

SCImago Journal Rank (SJR) 2016: 0.495
Source Normalized Impact per Paper (SNIP) 2016: 1.419


All Time Past Year Past 30 Days
Abstract Views 0 0 0
Full Text Views 57 57 19
PDF Downloads 14 14 10