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Measurement Science Review
Volume 12 (2012): Issue 6 (December 2012)
Open Access
Micro Fluxgate Sensor using Solenoid Coils Fabricated by MEMS Technology
Jian Lei
Jian Lei
,
Chong Lei
Chong Lei
and
Yong Zhou
Yong Zhou
| Dec 15, 2012
Measurement Science Review
Volume 12 (2012): Issue 6 (December 2012)
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Published Online:
Dec 15, 2012
Page range:
286 - 289
DOI:
https://doi.org/10.2478/v10048-012-0039-0
Keywords
Fluxgate sensor
,
magnetic sensor
,
micro-solenoid coil
,
nanocrystalline alloy
,
magnetic material
This content is open access.
Jian Lei
Science and Technology on Micro/Nano Fabrication Laboratory, Shanghai Jiao Tong University, Dongchuan Road 800, Shanghai 200240, China
Chong Lei
Science and Technology on Micro/Nano Fabrication Laboratory, Shanghai Jiao Tong University, Dongchuan Road 800, Shanghai 200240, China
Yong Zhou
Science and Technology on Micro/Nano Fabrication Laboratory, Shanghai Jiao Tong University, Dongchuan Road 800, Shanghai 200240, China