Multifractal characterization of epitaxial silicon carbide on silicon

Open access

Abstract

The purpose of this study was to investigate the topography of silicon carbide films at two steps of growth. The topography was measured by atomic force microscopy. The data were processed for extraction of information about surface condition and changes in topography during the films growth. Multifractal geometry was used to characterize three-dimensional micro- and nano-size features of the surface. X-ray measurements and Raman spectroscopy were performed for analysis of the films composition. Two steps of morphology evolution during the growth were analyzed by multifractal analysis. The results contribute to the fabrication of silicon carbide large area substrates for micro- and nanoelectronic applications.

[1] LI B., KANG P., GOU H„ WU G., MULA S., Corros. Sci., 88 (2014), 473.

[2] ZHOU Y., PAN G., SHI X., XU L., ZOU CH., GONG H., LUO G., Appl. Sur. Sci., 316 (2014), 643.

[3] LIU X., HAN Y., EVANS J.W., ENGSTFELD A.K., JUERGEN BEHM R., TRINGIDES M.C., HUPALO M., LIN H., HUANG L., HO K., APPY D., THIEL P.A., WANG C., Prog. Sur. Sci., 90 (2015), 397.

[4] LIANBI L., ZHIMING CH., LONGFEI X., CHEN Y., Mater. Lett., 93 (2013), 330.

[5] LONG-FEI X., ZHI-MINGA CH., LIAN-BIAB L., CHENA Y., XIAO-MIN H., NA Y., Appl. Sur. Sci., 261 (2012), 88.

[6] ANZALONE R., ALBERTI A., LAVIA F., Mater. Lett., 118 (2014), 130.

[7] CHAIKEN J., GOODISMA J., Photochem. Photobiol. A, 80 (1994), 53.

[8] VASILEV B., BOTT S., RZEHAK R., LISKE R., BARTHA J.W., 104 (2013), 48.

[9] DALLAEVA D., ŢĂ LU Ş., STACH S., ŠKARVADA P., TOMÁNEK P., GRMELA L., Appl. Sur. Sci., 312 (2014), 81.

[10] ŢĂ LU Ş., STACH S., MAHAJAN A., PATHAK D., WAGNER T., KUMAR A., BEDI R.K., ŢĂ LU M., Electron. Mater. Lett., 10 (2014), 719.

[11] ŢĂ LU Ş., GHAZAI A.J., STACH S., HASSAN A., HASSAN Z., ŢĂ LU M., J. Mater. Sci. Mater. El., 25 (2014), 466.

[12] ŢĂ LU Ş., STACH S., VALEDBAGI S., ELAHI S.M., BAVADI R., Mater. Sci.-Poland, 33 (2015), 137.

[13] ŢĂ LU Ş., BRAMOWICZ M., KULESZA S., SOLAYMANI S., GHADERI A., DEJAM L., ELAHI S.M., BOOCHANI A., Superlattice. Microst., 93 (2016), 109.

[14] ŢĂ LU Ş., Micro and nanoscale characterization of three dimensional surfaces. Basics and applications, Napoca Star Publishing House, Cluj-Napoca, Romania, 2015.

15] ŢĂ LU Ş., SOLAYMANI S., BRAMOWICZ M., NASERI N., KULESZA S., GHADERI A., RSC Adv., 6 (2016), 27228.

[16] ŢĂ LU Ş., BRAMOWICZ M., KULESZA S., GHADERI A., DALOUJI V., SOLAYMANI S., FATHI KENARI M., GHORANNEVISS M., J. Microsc., 264 (2016), 143.

[17] ŢĂ LU Ş., BRAMOWICZ M., KULESZA S., DALOUJI V., SOLAYMANI S., VALEDBAGI S., Microsc. Res. Tech., 79 (2016), 1208.

[18] ŢĂ LU Ş., BRAMOWICZ M., KULESZA S., GHADERI A., SOLAYMANI S., SAVALONI H., BABAEI R., J. Ind. Eng. Chem., 43 (2016), 164.

[19] RAMAZANOV S., ŢĂ LU Ş., SOBOLA D., STACH, S., RAMAZANOV G., Superlattice. Microstruct., 86 (2015), 395.

[20] RAMAZANOV SH. M., RAMAZANOV G. M., Tech. Phys. Lett., 40 (2014), 44.

[21] WUCHERPFENNIG TH., LAKOWITZ A., KRULL R., J. Biotechnol., 163 (2013), 124.

[22] ISO 25178-2: 2012, Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters. Available from: http://www.iso.org (accessed on March 10, 2017).

[23] KLADKO V.P., KUCHUK A.V., SAFRYUK N.V., MACHULIN V.F., BELYAEV A.E., HARDTDEGEN H., VITUSEVICH S.A., Appl. Phys. Lett., 95 (2009), 031907.

Journal Information


IMPACT FACTOR 2017: 0.854
5-year IMPACT FACTOR: 0.794



CiteScore 2017: 0.90

SCImago Journal Rank (SJR) 2017: 0.275
Source Normalized Impact per Paper (SNIP) 2017: 0.471

Metrics

All Time Past Year Past 30 Days
Abstract Views 0 0 0
Full Text Views 83 83 15
PDF Downloads 44 44 11