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Materials Science-Poland
Volume 35 (2017): Issue 3 (October 2017)
Open Access
Multifractal characterization of epitaxial silicon carbide on silicon
Ştefan Ţălu
Ştefan Ţălu
,
Sebastian Stach
Sebastian Stach
,
Shikhgasan Ramazanov
Shikhgasan Ramazanov
,
Dinara Sobola
Dinara Sobola
and
Guseyn Ramazanov
Guseyn Ramazanov
| Oct 31, 2017
Materials Science-Poland
Volume 35 (2017): Issue 3 (October 2017)
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Published Online:
Oct 31, 2017
Page range:
539 - 547
Received:
Oct 13, 2016
Accepted:
Mar 28, 2017
DOI:
https://doi.org/10.1515/msp-2017-0049
Keywords
surface roughness
,
multifractal analysis
,
atomic force microscopy
,
silicon carbide
,
film growth
© 2017
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.