Multi-Wavelength Interferometry for Length Measurements Using Diode Lasers

Abou-Zeid, A. (1988). Diode lasers for interferometry. J. of Precision Engineering, 11 (3), 139.Search in Google Scholar

Bodermann, B., Burgarth, V., Abou-Zeid, A. (2001). Modulation-free stabilised diode laser for interferometry using Doppler-reduced Rb transitions. In Balsamo, A. et al (eds.) Proc. 2nd Euspen Topical Conference.Turin, Italy, Vol. 1, 294-297.Search in Google Scholar

Zarka, A., Abou-Zeid, A. et al (2000). International comparison of eight semiconductor lasers stabilised on 127I2 at 633 nm. Metrologia, 37 (4), 329.10.1088/0026-1394/37/4/11Search in Google Scholar

Bourdet, G. L., Orszag, A. G. (1979). Absolute distance measurements by CO2 laser multiwavelength interferometry. Applied Optics 18, 225-227.10.1364/AO.18.00022520208691Search in Google Scholar

Bechstein, K. H., Fuchs, W. (1998). Absolute interferometric distance measurements applying a variable synthetic wavelength. Journal of Optics 29, 179-182.10.1088/0150-536X/29/3/014Search in Google Scholar

Kinder, T., Salewski, K.D. (2002). Absolute distance interferometer with grating stabilised tunable diode laser at 633 nm. Journal of Optics A: Pure and Applied Optics 4, 364-368.10.1088/1464-4258/4/6/381Search in Google Scholar

Hartmann, L., Meiners-Hagen, K., Abou-Zeid, A. (2008). An absolute distance interferometer with two external cavity diode lasers. Measurement Science and Technology 19, 045307.10.1088/0957-0233/19/4/045307Search in Google Scholar

Bönsch, G., Potulski, E. (1998). Measurement of the refractive index of air and comparison with modified Edlens formulae. Metrologia 35, 133-139.10.1088/0026-1394/35/2/8Search in Google Scholar

Heydemann, P. L. M. (1981). Determination and correction of quadrature fringe measurement errors in interferometers. Applied Optics 20, 3382-3384.10.1364/AO.20.00338220333158Search in Google Scholar

Meiners-Hagen, K., Burgarth, V., Abou-Zeid, A. (2004). Profilometry with a multi-wavelength diode laser interferometer. Measurement Science and Technology 15, 741-746.10.1088/0957-0233/15/4/018Search in Google Scholar

Abou-Zeid, A., Wolf, M. (2004). Profilometry: using a diode laser interferometer with three wavelengths. In De Chiffre, L., Carneiro, K. (eds.) Proc. 1st Euspen Topical Conference on Fabrication and Metrology in Nanotechnology. Copenhagen, Denmark, Vol. 1, 137-140.Search in Google Scholar

Schödel, R., Nicolaus, A., Bönsch, G. (2002). Phase stepping interferometry: Methods to reduce errors caused by camera nonlinearities. Applied Optics 41, 55-63.10.1364/AO.41.000055Search in Google Scholar

Schödel, R., Decker, J. E. (2004). Methods to recognize the sample position for most precise interferometric length measurements. In Proceedings of SPIE. Vol. 5532, 237-247.10.1117/12.555835Search in Google Scholar

Schödel, R., Bönsch, G. (2004). Highest accuracy interferometer alignment by retroreflection scanning. Applied Optics 43, 5738-5743.10.1364/AO.43.005738Search in Google Scholar

Schödel, R., Nicolaus, A., Bönsch, G. (2003). Minimizing interferometer misalignment errors for measurement of sub-nanometer length changes. In Proceedings of SPIE. Vol. 5190, 34-42.10.1117/12.503677Search in Google Scholar