Accès libre

Influence of substrate temperature and gas pressure on aluminum oxynitride coatings obtained by pulsed laser deposition

Joanna Piwowarczyk
Joanna Piwowarczyk
, 
Roman Jędrzejewski
Roman Jędrzejewski
 et 
Jolanta Baranowska
Jolanta Baranowska
   | 24 févr. 2017
Materials Science-Poland's Cover Image
À propos de cet article
Article précédent
Article suivant
Citez
Publié en ligne: 24 févr. 2017
Pages: 254 - 264
Reçu: 16 oct. 2016
Accepté: 22 janv. 2017
DOI: https://doi.org/10.1515/msp-2017-0033
Mots clés
© 2017 Joanna Piwowarczyk, Roman Jędrzejewski, Jolanta Baranowska
This article is distributed under the terms of the Creative Commons Attribution Non-Commercial License, which permits unrestricted non-commercial use, distribution, and reproduction in any medium, provided the original work is properly cited.

AFM images of surface topography (20 μm × 20 μm) of coatings obtained at different substrate temperatures.
AFM images of surface topography (20 μm × 20 μm) of coatings obtained at different substrate temperatures.

Roughness of coatings obtained at different substrate temperatures.
Roughness of coatings obtained at different substrate temperatures.

Thickness of coatings obtained at different substrate temperatures.
Thickness of coatings obtained at different substrate temperatures.

Hardness of coatings obtained at different substrate temperatures.
Hardness of coatings obtained at different substrate temperatures.

Young’s modulus of coatings obtained at different substrate temperatures.
Young’s modulus of coatings obtained at different substrate temperatures.

Surface topography (20 μm × 20 μm) of coatings obtained at various deposition pressures; (a) to (c) is AFM; (d) is optical microscopy, and (e) is SEM.
Surface topography (20 μm × 20 μm) of coatings obtained at various deposition pressures; (a) to (c) is AFM; (d) is optical microscopy, and (e) is SEM.

Roughness of coatings obtained at various deposition pressures.
Roughness of coatings obtained at various deposition pressures.

Thickness of coating obtained at various deposition pressures.
Thickness of coating obtained at various deposition pressures.

Hardness of coatings obtained at various deposition pressures.
Hardness of coatings obtained at various deposition pressures.

Oxygen and nitrogen concentrations (a) and N + O:Al ratio (b) in coatings obtained at different temperatures; EDS and WDS.
Oxygen and nitrogen concentrations (a) and N + O:Al ratio (b) in coatings obtained at different temperatures; EDS and WDS.

Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different pressures; EDS and WDS.
Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different pressures; EDS and WDS.

Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different atmosphere compositions (based on the results presented in the literature [17]); EDS and WDS.
Oxygen and nitrogen concentration (a), and N + O:Al ratio (b) in coatings obtained at different atmosphere compositions (based on the results presented in the literature [17]); EDS and WDS.
eISSN:
2083-134X
Langue:
Anglais
Périodicité:
4 fois par an
Sujets de la revue:
Materials Sciences, other, Nanomaterials, Functional and Smart Materials, Materials Characterization and Properties
RSS Feed de la revue