Electrostatic field in terms of geometric curvature in membrane MEMS devices
Publié en ligne: 20 juil. 2017
Pages: 165 - 184
Reçu: 07 mai 2017
Accepté: 16 juin 2017
© 2017
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.