<abstract xmlns="http://www.w3.org/1999/xhtml"><p> Diamond and/or carbon thin films are in the center of interest due to their variability and extraordinary combination of intrinsic properties. However, some applications require fabrication of films with tailored properties. Especially, fabrication of periodic structures is highly attractive due to their increased surface area. In this contribution we point out the key technological aspects for fabrication of micro- and nano-sized carbon-based structures. Three representative structures are presented: diamond nanorods, self-assembled templates and self-standing diamond membranes. We found that the diameter of diamond nanorods can be controlled in a broad range from 10 to 200 nm by the masking material (Au vs Ni) and its initial thickness (from few to tens of nanometers). The assembly of polystyrene microspheres in mono- or multi-layer with square or hexagonal periodicities was controlled by the spin-coating parameters. The diamond porous membrane was selectively grown on Si substrate with an interdigital or mesh like geometry. Advantages of each structure as well as the fabrication limitations are discussed more in detail and finally their representative applications are pointed out.</p></abstract>

Diamond and/or carbon thin films are in the center of interest due to their variability and extraordinary combination of intrinsic properties. However, some applications require fabrication of films with tailored properties. Especially, fabrication of periodic structures is highly attractive due to their increased surface area. In this contribution we point out the key technological aspects for fabrication of micro- and nano-sized carbon-based structures. Three representative structures are presented: diamond nanorods, self-assembled templates and self-standing diamond membranes. We found that the diameter of diamond nanorods can be controlled in a broad range from 10 to 200 nm by the masking material (Au vs Ni) and its initial thickness (from few to tens of nanometers). The assembly of polystyrene microspheres in mono- or multi-layer with square or hexagonal periodicities was controlled by the spin-coating parameters. The diamond porous membrane was selectively grown on Si substrate with an interdigital or mesh like geometry. Advantages of each structure as well as the fabrication limitations are discussed more in detail and finally their representative applications are pointed out.

Technological Aspects in Fabrication of Micro- and Nano-Sized Carbon Based Features: Nanorods, Periodical Arrays and Self-Standing Membranes

Institute of Physics, Czech Academy of Sciences v.v.i, Cukrovarnická 10, 162 00 Prague 6, Czech Republic

Department of Physics, Faculty of Civil Engineering, Czech Technical University in Prague, Th´akurova 7, 166 29 Prague 6, Czech Republic

Department of Physics, Faculty of Civil Engineering, Czech Technical University in Prague, Thákurova 7, 166 29 Prague 6, Czech Republic

Journal of Electrical Engineering

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Diamond and/or carbon thin films are in the center of interest due to their variability and extraordinary combination of intrinsic properties. However, some...

Technological Aspects in Fabrication of Micro- and Nano-Sized Carbon Based Features: Nanorods, Periodical Arrays and Self-Standing Membranes

Online veröffentlicht: 10. Nov. 2015

Seitenbereich: 282 - 286

Eingereicht: 17. Aug. 2015

DOI: https://doi.org/10.2478/jee-2015-0046

Schlüsselwörter
diamond, carbon, nanorods, microsphere lithography, selective area deposition, SEM

© Faculty of Electrical Engineering and Information Technology, Slovak University of Technology

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Technological Aspects in Fabrication of Micro- and Nano-Sized Carbon Based Features: Nanorods, Periodical Arrays and Self-Standing Membranes

Online veröffentlicht: 10. Nov. 2015

Seitenbereich: 282 - 286

Eingereicht: 17. Aug. 2015

DOI: https://doi.org/10.2478/jee-2015-0046

Schlüsselwörterdiamond, carbon, nanorods, microsphere lithography, selective area deposition, SEM

© Faculty of Electrical Engineering and Information Technology, Slovak University of Technology

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Schlüsselwörter
diamond, carbon, nanorods, microsphere lithography, selective area deposition, SEM