Login
Register
Reset Password
Publish & Distribute
Publishing Solutions
Distribution Solutions
Subjects
Publications
Journals
Books
Proceedings
Publishers
Blog
Contact
Search
Cart
EUR
USD
GBP
English
English
Deutsch
Polski
Español
Français
Italiano
Home
Journals
Materials Science-Poland
Volume 37 (2019): Issue 3 (September 2019)
Open Access
Structural and surface analysis of chemical vapor deposited boron doped aluminum nitride thin film on aluminum substrates
Shanmugan Subramani
Shanmugan Subramani
and
Mutharasu Devarajan
Mutharasu Devarajan
| Oct 18, 2019
Materials Science-Poland
Volume 37 (2019): Issue 3 (September 2019)
About this article
Previous Article
Next Article
Abstract
References
Authors
Articles in this Issue
Preview
PDF
Cite
Share
Published Online:
Oct 18, 2019
Page range:
395 - 403
Received:
Apr 19, 2018
Accepted:
Apr 23, 2019
DOI:
https://doi.org/10.2478/msp-2019-0056
Keywords
B-AlN
,
thin film synthesis
,
CVD
,
Al substrate structural parameter
,
surface analysis
© 2019 Shanmugan Subramani et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.