Role of RF power on physical properties of RF magnetron sputtered GaN/p-Si(1 0 0) thin film

[1] Neumayer D.A., Ekerdt J.G., Chemistry of Materials, 8 (1996), 9.10.1021/cm950108rSearch in Google Scholar

[2] Strite S., Morkoc H., J. Vac. Sci. Technol. B, B10 (1992), 1237.10.1116/1.585897Search in Google Scholar

[3] Hu X.-L., Wen R.-L., Qi Z.-Y., Wang H., Materials Science in Semiconductor Processing, 79 (2018), 61.10.1016/j.mssp.2018.01.024Search in Google Scholar

[4] Mantarci A., Kundakçi M., Bulletin of Materials Science, 42 (2019), 196.10.1007/s12034-019-1883-4Search in Google Scholar

[5] Brendel M., Pertzsch E., Abrosimova V., Trenkler T., Weyers M., in: M. Kneissl, J. Rass (Eds.), III-Nitride Ultraviolet Emitters: Technology and Applications, Springer International Publishing, Cham, 2016, p. 219.10.1007/978-3-319-24100-5_9Search in Google Scholar

[6] King S.W., Davis R.F., Nemanich R.J., Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 32 (2014), 061504.10.1116/1.4894816Search in Google Scholar

[7] Mantarci A., Emerg. Mater. Res., 8 (2019), 1.Search in Google Scholar

[8] Ajay A., Kotsar Y., Monroy E., in: J. Huang, H.-C. Kuo, S.-C. Shen (Eds.) Nitride Semiconductor Light-Emitting Diodes (LEDs) (Second Edition),Woodhead Publishing, 2018, pp. 587.10.1016/B978-0-08-101942-9.00018-6Search in Google Scholar

[9] Chatterjee U., Park J.-H., Um D.-Y., Lee C.-R., Renewable and Sustainable Energy Reviews, 79 (2017), 1002.10.1016/j.rser.2017.05.136Search in Google Scholar

[10] Pampili P., Parbrook P.J., Materials Science in Semiconductor Processing, 62 (2017), 180.10.1016/j.mssp.2016.11.006Search in Google Scholar

[11] Mantarci A., Kundakçi M., Opt. Quant. Electron., 51 (2019), 81.10.1007/s11082-019-1795-ySearch in Google Scholar

[12] He X.G., Zhao D.G., Jiang D.S., Zhu J.J., Chen P., Liu Z.S., Le L.C., Yang J., Li X.J., Liu J.P., Zhang L.Q., Yang H., Journal of Alloys and Compounds, 662 (2016), 16.10.1016/j.jallcom.2015.12.031Search in Google Scholar

[13] Saito W., Suwa T., Uchihara T., Naka T., Kobayashi T., Microelectronics Reliability, 55 (2015), 1682.10.1016/j.microrel.2015.06.126Search in Google Scholar

[14] Moon W.H., Kim H.J., Choi C.H., Scripta Materialia, 56 (2007), 345.10.1016/j.scriptamat.2006.11.013Open DOISearch in Google Scholar

[15] Lee J.-M., Min B.-G., Ju C.-W., Ahn H.-K., Lim J.-W., Current Applied Physics, 17 (2017), 157.10.1016/j.cap.2016.11.014Search in Google Scholar

[16] Qian H., Lee K.B., Vajargah S.H., Novikov S.V., Guiney I., Zaidi Z.H., Jiang S., Wallis D.J., Foxon C.T., Humphreys C.J., Houston P.A., Journal of Crystal Growth, 459 (2017), 185.10.1016/j.jcrysgro.2016.12.025Search in Google Scholar

[17] Miyoshi M., Tsutsumi T., Kabata T., Mori T., Egawa T., Solid-State Electronics, 129 (2017), 29.10.1016/j.sse.2016.12.009Search in Google Scholar

[18] Sheu J.-K., Chen P.-C., Shin C.-L., Lee M.-L., Liao P.-H., Lai W.-C., Solar Energy Materials and Solar Cells, 157 (2016), 727.10.1016/j.solmat.2016.07.047Search in Google Scholar

[19] Xing Z., Wang R.X., Fan Y.M., Wang J.F., Zhang B.S., Xu K., Materials Science in Semiconductor Processing, 57 (2017), 132.10.1016/j.mssp.2016.10.017Search in Google Scholar

[20] Liu Z., Chong W.C., Wong K.M., Lau K.M., Microelectronic Engineering, 148 (2015), 98.10.1016/j.mee.2015.09.007Search in Google Scholar

[21] Lin J.-H., Huang S.-J., Su Y.-K., Huang K.-W., Applied Surface Science, 354 (2015), 168.10.1016/j.apsusc.2015.02.151Search in Google Scholar

[22] Mantarci A., Gündüz B., Optical and Quantum Electronics, 48 (2016), 547.10.1007/s11082-016-0822-5Search in Google Scholar

[23] Martinez-Guerrero E., Adelmann C., Chabuel F., Simon J., Pelekanos N.T., Mula G., Daudin B., Feuillet G., Mariette H., Applied Physics Letters, 77 (2000), 809.10.1016/S0370-2693(99)01424-0Open DOISearch in Google Scholar

[24] Ambacher O., Majewski J., Miskys C., Link A., Hermann M., Eickhoff M., Stutzmann M., Bernardini F., Fiorentini V., Tilak V., Schaff B., Eastman L.F., Journal of Physics: Condensed Matter, 14 (2002), 3399.10.1088/0953-8984/14/13/302Search in Google Scholar

[25] Wang M., Bian J., Sun H., Liu W., Zhang Y., Luo Y., Applied Surface Science, 389 (2016), 199.10.1016/j.apsusc.2016.07.109Search in Google Scholar

[26] Gu S., Chagarov E.A., Min J., Madisetti S., Novak S., Oktyabrsky S., Kerr A.J., Kaufman-Osborn T., Kummel A.C., Asbeck P.M., Applied Surface Science, 317 (2014), 1022.10.1016/j.apsusc.2014.09.028Search in Google Scholar

[27] Mantarci A., Kundakçi M., AIP Conference Proceedings, 1833 (2017), 020119.Search in Google Scholar

[28] Braniste T., Ciers J., Monaico E., Martin D., Carlin J.F., Ursaki V.V., Sergentu V.V., Tiginyanu I.M., Grandjean N., Superlattices and Microstructures, 102 (2017), 221.10.1016/j.spmi.2016.12.041Search in Google Scholar

[29] Mutlu K., Asim M., Erman E., Materials Research Express, 4 (2017), 016410.10.1088/2053-1591/aa5858Search in Google Scholar

[30] Erdoğan E., Kundakçi M., Mantarci A., in: Journal of Physics: Conference Series, IOP Publishing, 2016, pp. 012019.10.1088/1742-6596/707/1/012019Search in Google Scholar

[31] Fong C.Y., Ng S.S., Yam F.K., Abu Hassan H., Hassan Z., Vacuum, 119 (2015), 119.10.1016/j.vacuum.2015.04.042Search in Google Scholar

[32] Kawwam M., Lebbou K., Applied Surface Science, 292 (2014), 906.10.1016/j.apsusc.2013.12.078Search in Google Scholar

[33] Yin M.L., Zou C.W., Li M., Liu C.S., Guo L.P., Fu D.J., Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 262 (2007), 189.10.1016/j.nimb.2007.05.034Search in Google Scholar

[34] Shinoda H., Mutsukura N., Vacuum, 125 (2016), 133.10.1016/j.vacuum.2015.12.008Search in Google Scholar

[35] Li L., Huang J., Yang W., Tang K., Ren B., Xu H., Wang L., Surface and Coatings Technology, 307 (2016), 1024.10.1016/j.surfcoat.2016.08.005Search in Google Scholar

[36] Abud S.H., Selman A.M., Hassan Z., Superlattices and Microstructures, 97 (2016), 586.10.1016/j.spmi.2016.07.017Search in Google Scholar

[37] Yudate S., Fujii T., Shirakata S., Thin Solid Films, 517 (2008), 1453.10.1016/j.tsf.2008.09.022Search in Google Scholar

[38] Liuan L., Yonggang X., Qingpeng W., Ryosuke N., Ying J., Jin-Ping A., Semiconductor Science and Technology, 30 (2015), 015019.10.1088/0268-1242/30/1/015019Search in Google Scholar

[39] Shinoda H., Mutsukura N., Thin Solid Films, 516 (2008), 2837.10.1016/j.tsf.2007.05.035Search in Google Scholar

[40] Kuo D.-H., Tuan T.T.A., Li C.-C., Yen W.-C., Materials Science and Engineering: B, 193 (2015), 13.10.1016/j.mseb.2014.11.005Search in Google Scholar

[41] Biswas A., Bhattacharyya D., Sahoo N.K., Yadav B.S., Major S.S., Srinivasa R.S., Journal of Applied Physics, 103 (2008), 083541.10.1063/1.2903443Search in Google Scholar

[42] Selman A.M., Hassan Z., Husham M., Measurement, 56 (2014), 155.10.1016/j.measurement.2014.06.027Open DOISearch in Google Scholar

[43] Schulz H., Thiemann K.H., Solid State Communications, 23 (1977), 815.10.1016/0038-1098(77)90959-0Open DOISearch in Google Scholar

[44] Yeh C.-Y., Lu Z.W., Froyen S., Zunger A., Physical Review B, 46 (1992), 10086.10.1103/PhysRevB.46.10086Search in Google Scholar

[45] Orak I., Kocyigit A., Turut A., Journal of Alloys and Compounds, 691 (2017), 873.10.1016/j.jallcom.2016.08.295Search in Google Scholar

[46] Patterson A.L., Physical Review, 56 (1939), 978.10.1103/PhysRev.56.978Open DOISearch in Google Scholar

[47] Hughes W.C., JR. W.H.R., Johnson M.A.L., Fujita S., JR. J.W.C., Schetzina J.F., Ren J., Edmond J.A., Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 13 (1995), 1571.10.1116/1.588189Search in Google Scholar

[48] Proceedings of the Royal Society of London. Series A, 88 (1913), 428.10.1098/rspa.1913.0040Search in Google Scholar

[49] Aggarwal N., Krishna S.T.C., Goswami L., Mishra M., Gupta G., Maurya K.K., Singh S., Dilawar N., Kaur M., Crystal Growth & Design, 15 (2015), 2144.10.1021/acs.cgd.5b00125Search in Google Scholar

[50] Liu L., Edgar J.H., Materials Science and Engineering: R: Reports, 37 (2002), 61.10.1016/S0927-796X(02)00008-6Search in Google Scholar

[51] Kisielowski C., Krüger J., Ruvimov S., Suski T., Ager J.W., Jones E., Liliental-Weber Z., Rubin M., Weber E.R., Bremser M.D., Davis R.F., Physical Review B, 54 (1996), 17745.10.1103/PhysRevB.54.17745Open DOISearch in Google Scholar

[52] Kozawa T., Kachi T., Kano H., Nagase H., Koide N., Manabe K., Journal of Applied Physics, 77 (1995), 4389.10.1063/1.359465Search in Google Scholar

[53] Van de Walle C.G., Physical Review B, 68 (2003), 165209.10.1103/PhysRevB.68.165209Search in Google Scholar

[54] Kaufmann N.A., Lahourcade L., Hourahine B., Martin D., Grandjean N., Journal of Crystal Growth, 433 (2016), 36.10.1016/j.jcrysgro.2015.06.013Search in Google Scholar

[55] Kim H.W., Kim N.H., Applied Surface Science, 236 (2004), 192.10.1016/j.apsusc.2004.04.029Search in Google Scholar

[56] Demir M., Yarar Z., Ozdemir M., Solid State Communications, 158 (2013), 29.10.1016/j.ssc.2013.01.004Search in Google Scholar

[57] Li J.-S., Tang Y., Li Z.-T., Ding X.-R., Li Z., Applied Surface Science, 410 (2017), 60.10.1016/j.apsusc.2017.03.041Search in Google Scholar

[58] Yang D., Wang L., Hao Z.-B., Luo Y., Sun C., Han Y., Xiong B., Wang J., Li H., Superlattices and Microstructures, 99 (2016), 221.10.1016/j.spmi.2016.02.016Search in Google Scholar

[59] Zhang Y., Kappers M.J., Zhu D., Oehler F., Gao F., Humphreys C.J., Solar Energy Materials and Solar Cells, 117 (2013), 279.10.1016/j.solmat.2013.06.022Search in Google Scholar

[60] Kudrawiec R., Nyk M., Syperek M., Podhorodecki A., Misiewicz J., Strek W., Applied Physics Letters, 88 (2006), 181916.10.1063/1.2199489Search in Google Scholar

[61] You Y.-S., Feng S.-W., Wang H.-C., Song J., Han J., Journal of Luminescence, 182 (2017), 196.10.1016/j.jlumin.2016.10.039Search in Google Scholar

[62] Tauc J., Menth A., Journal of Non-Crystalline Solids, 8 (1972), 569.10.1016/0022-3093(72)90194-9Search in Google Scholar

[63] Stenzel O., The physics of thin film optical spectra, Springer, 2005.Search in Google Scholar

[64] Reshchikov M.A., Usikov A., Helava H., Makarov Y., Prozheeva V., Makkonen I., Tuomisto F., Leach J.H., Udwary K., Scientific Reports, 7 (2017), 9297.10.1038/s41598-017-08570-1557098328839151Search in Google Scholar

[65] Said A., Debbichi M., Said M., Optik-International Journal for Light and Electron Optics, 127 (2016), 9212.10.1016/j.ijleo.2016.06.103Search in Google Scholar

[66] Gueddim A., Eloud T., Messikine N., Bouarissa N., Superlattices and Microstructures, 77 (2015), 124.10.1016/j.spmi.2014.11.003Search in Google Scholar

[67] Liao J.-H., Huang H.-W., Cheng L.-C., Liu H.-H., Chyi J.-I., Cai D.-P., Chen C.-C., Lai K.-Y., Solar Energy Materials and Solar Cells, 132 (2015), 544.10.1016/j.solmat.2014.10.008Search in Google Scholar

[68] Zhang H., Zhang D., Wang W., Journal of Luminescence, 192 (2017), 470.10.1016/j.jlumin.2017.07.022Search in Google Scholar

[69] Hiroshi H., Journal of Physics: Condensed Matter, 14 (2002), R967.10.1088/0953-8984/14/38/201Search in Google Scholar

[70] Sekine T., Komatsu Y., Iwaya R., Kuroe H., Kikuchi A., Kishino K., Journal of the Physical Society of Japan, 86 (2017), 074602.10.7566/JPSJ.86.074602Search in Google Scholar

[71] Dyson A., Journal of physics. Condensed matter: an Institute of Physics journal, 21 (2009), 174204.10.1088/0953-8984/21/17/17420421825408Search in Google Scholar

[72] Nootz G., Schulte A., Chernyak L., Osinsky A., Jasinski J., Benamara M., Liliental-Weber Z., Applied Physics Letters, 80 (2002), 1355.10.1063/1.1449523Search in Google Scholar

[73] Park B.-G., Saravana Kumar R., Moon M.-L., Kim M.-D., Kang T.-W., Yang W.-C., Kim S.-G., Journal of Crystal Growth, 425 (2015), 149.10.1016/j.jcrysgro.2015.03.009Search in Google Scholar

[74] Mizushima I., Tang P.T., Hansen H.N., Somers M.A.J., Electrochimica Acta, 51 (2006), 6128.10.1016/j.electacta.2005.11.053Open DOISearch in Google Scholar

[75] Moon M.W., Chung J.W., Lee K.R., Oh K.H., Wang R., Evans A.G., Acta Materialia, 50 (2002), 1219.10.1016/S1359-6454(01)00423-2Open DOISearch in Google Scholar