<abstract xmlns="http://www.w3.org/1999/xhtml"> The main subject of this study are molecular structures and optical properties of boron-doped diamond films with [B]/[C]ppm ratio between 1000 and 10 000, fabricated in two molar ratios of CH4-H2mixture (1 % and 4 %). Boron-doped diamond (BDD) film on the fused silica was presented as a conductive coating for optical and electronic purposes. The scanning electron microscopy images showed homogenous and polycrystalline surface morphology. The Raman spectroscopy confirmed the growth of sp3diamond phase and sp2carbon phase, both regular and amorphous, on the grain boundaries, as well as the efficiency of boron doping. The sp3/sp2ratio was calculated using the Raman spectra deconvolution method. A high refractive index (in a range of 2.0 to 2.4 at λ= 550 nm) was achieved for BDD films deposited at 700 °C. The values of extinction coefficient were below 1.4 at λ= 550 nm, indicating low absorption of the film</abstract>

The main subject of this study are molecular structures and optical properties of boron-doped diamond films with [B]/[C]ppm ratio between 1000 and 10 000, fabricated in two molar ratios of CH4-H2mixture (1 % and 4 %). Boron-doped diamond (BDD) film on the fused silica was presented as a conductive coating for optical and electronic purposes. The scanning electron microscopy images showed homogenous and polycrystalline surface morphology. The Raman spectroscopy confirmed the growth of sp3diamond phase and sp2carbon phase, both regular and amorphous, on the grain boundaries, as well as the efficiency of boron doping. The sp3/sp2ratio was calculated using the Raman spectra deconvolution method. A high refractive index (in a range of 2.0 to 2.4 at λ= 550 nm) was achieved for BDD films deposited at 700 °C. The values of extinction coefficient were below 1.4 at λ= 550 nm, indicating low absorption of the film

Gas Composition Influence on the Properties of Boron-Doped Diamond Films Deposited on the Fused Silica

Materials Science-Poland

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

The main subject of this study are molecular structures and optical properties of boron-doped diamond films with [B]/[C]ppm ratio between 1000 and 10 000,...

Gas Composition Influence on the Properties of Boron-Doped Diamond Films Deposited on the Fused Silica

Published Online: Jun 25, 2018

Page range: 288 - 296

Received: May 29, 2017

Accepted: Apr 14, 2018

DOI: https://doi.org/10.2478/msp-2018-0046

Keywords
microwave plasma chemical vapor deposition, boron-doped diamond, optical constants, fused silica

© 2018 Bartłomiej Dec et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Gas Composition Influence on the Properties of Boron-Doped Diamond Films Deposited on the Fused Silica

Published Online: Jun 25, 2018

Page range: 288 - 296

Received: May 29, 2017

Accepted: Apr 14, 2018

DOI: https://doi.org/10.2478/msp-2018-0046

Keywordsmicrowave plasma chemical vapor deposition, boron-doped diamond, optical constants, fused silica

© 2018 Bartłomiej Dec et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Keywords
microwave plasma chemical vapor deposition, boron-doped diamond, optical constants, fused silica