Thickness and tensile stress determination of black silicon layers by spectral reflectance and Raman scattering

[1] H. Savin, P. Repo, G. von Gastrow, P. Ortega, E. Calle, M. Garín and R. Alcubilla, “Black silicon solar cells with interdigitated back-contacts achieve 22.1% efficiency”, Nature Nanotechnology, vol. 10, pp. 624–628, 2015.10.1038/nnano.2015.8925984832Search in Google Scholar

[2] P. B. Clapham and M. C. Hutley, “Reduction of Lens Reflexion by the “Moth Eye” Principle”, Nature, vol. 244, pp. 281–282, 1973.10.1038/244281a0Search in Google Scholar

[3] F. Karbassian, Porous Silicon, IntechOpen Limited, London, 2018.10.5772/intechopen.72910Search in Google Scholar

[4] B. Fodor, E. Agocs, B. Bardet, T. Defforge, F. Cayrel, D. Alquier, M. Fried, G. Gautier and P. Petrik, “Porosity and thickness characterization of porous Si and oxidized porous Si layers–an ultraviolet-visible-mid infrared ellipsometry study”, Microporous and Mesoporous Materials, vol. 227, pp. 112–120, 2016.10.1016/j.micromeso.2016.02.039Search in Google Scholar

[5] N. J. Hutchinson, T. Coquil, A. Navid and L. Pilon, “Effective optical properties of highly ordered mesoporous thin films”, Thin Solid Films, vol. 518, pp. 2141–2146, 2010.10.1016/j.tsf.2009.08.048Search in Google Scholar

[6] D. Raghunathan, “Black silicon for higher efficiency in solar cells”, Applied Mechanics and Materials, vol. 787, pp. 92–96, 2015.10.4028/www.scientific.net/AMM.787.92Search in Google Scholar

[7] J. Oh, H.-Ch. Yuan and H. M. Branz, “An 18.2%-efficient black-silicon solar cell achieved through control of carrier recombination in nanostructures”, Nature Nanotechnology, vol. 7, pp. 743–748, 2012.10.1038/nnano.2012.16623023643Search in Google Scholar

[8] D. Losic, Electrochemically Engineered Nanoporous Materials – Methods, Properties and Applications, Springer, 2015.10.1007/978-3-319-20346-1Search in Google Scholar

[9] L. Canham, Handbook of Porous Silicon, Springer, 2014.10.1007/978-3-319-05744-6_16Search in Google Scholar

[10] M. J. Sailor, Porous Silicon in Practice, Wiley-VCH Verlag & Co. KGaA, Weinheim, 2012.Search in Google Scholar

[11] V. Lehmann, Electrochemistry of Silicon, Wiley-VCH Verlag & Co. KGaA, Weinheim, 2002.Search in Google Scholar

[12] M. Pakhotnyuk, R. S. Davidsen, M. S. Schmidt, R. Malureanu, E. Stamate, O. Hansen, “Lifetime of Nano-Structured Black Silicon for Photovoltaic Applications”, Proceedings of 32nd European Photovoltaic Solar Energy Conference and Exhibition, pp. 764–767, 2016.Search in Google Scholar

[13] S. Franssila, Introduction to Microfabrication, Second Edition, John Wiley & Sons, Ltd., Chichester, 2010.10.1002/9781119990413Search in Google Scholar

[14] A. R. Hind and L. Chomette, The determination of thin film thickness using reflectance spectroscopy – Application Note, Agilent Technologies, Inc., 2011.Search in Google Scholar

[15] T. Hine, UV Talk Letter, Schimazu, vol. 1, 2008.Search in Google Scholar

[16] C. F. Ramirez-Gutierrez, J. D. Castano-Yepes and M. E. Rodriguez-Garcia, “Porosity and roughness determination of porous silicon thin films by genetic algorithms”, Optik, vol. 173, pp. 271–278, 2018.10.1016/j.ijleo.2018.08.019Search in Google Scholar

[17] H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry, William Andrew, Inc., Norwich, 2005.10.1007/3-540-27488-XSearch in Google Scholar

[18] Z. Montiel-González, S. Escobar, R. Nava, J. A. del Río and J. Tagüena-Martínez, “Role of an Oxidant Mixture as Surface Modifier of Porous Silicon Microstructures Evaluated by Spectroscopic Ellipsometry”, Scientific Reports, 2016.10.1038/srep24798Search in Google Scholar

[19] Horiba, New Amorphous Dispersion Formula – Technical Note, vol. TN12, 2006.Search in Google Scholar

[20] Horiba, Lorentz Dispersion Formula – Techn. Note, vol. TN02, 2006.Search in Google Scholar

[21] Horiba, Tauc-Lorentz Dispersion Formula – Technical Note, vol. TN11, 2006.Search in Google Scholar

[22] Horiba, Cauchy and related Empirical Dispersion Formulae for Transparent Materials – Technical Note, vol. NT14, Horiba, 2006.Search in Google Scholar

[23] H. Sohn, Refractive Index of Porous Silicon, Springer International Publishing Switzerland, 2014.10.1007/978-3-319-05744-6_25Search in Google Scholar

[24] A. Navid and L. Pilon, “Effect of polarization and morphology on the optical properties of absorbing nanoporous thin films”, Thin Solid Films, vol. 516, pp. 4159–4167, 2008.10.1016/j.tsf.2007.10.117Search in Google Scholar

[25] A. Garahan, L. Pilon and J. Yin, “Effective optical properties of absorbing nanoporous and nanocomposite thin films”, Journal of Applied Physics, vol. 101, pp. 014320, 2007.10.1063/1.2402327Search in Google Scholar

[26] M. M. Braun and L. Pilon, “Effective optical properties of non-absorbing nanoporous thin films”, Thin Solid Films, vol. 496, pp. 505–514, 2006.10.1016/j.tsf.2005.08.173Search in Google Scholar

[27] N. J. Hutchinson, T. Coquil, E. K. Richman, S. H. Tolbert and L. Pilon, “Reflectance of surfactant-templated mesoporous silica thin films: Simulations versus experiments”, Thin Solid Films, vol. 518, pp. 2134–2140, 2010.10.1016/j.tsf.2009.08.006Search in Google Scholar

[28] H. Richter, Z. P. Wang and L. Ley, “The one phonon Raman spectrum in microcrystalline silicon”, Solid State Communications, vol. 39, pp. 625–629, 1981.10.1016/0038-1098(81)90337-9Search in Google Scholar