<abstract xmlns="http://www.w3.org/1999/xhtml">Atomic layer deposited polycrystalline Cr2O3 films grown from chromyl chloride and methanol were analysed using spectrophotometry, spectral ellipsometry and atomic force microscopy. The films possessed polycrystalline eskolaite structure with rough sublayer in contact with air. Using the positions and peak widths of the two visible absorption bands as fixed from absorption measurements, we could determine the optical dispersion of the film material in 1.3 – 6 eV energy region. A direct band gap of chromia film grown in these conditions was 3.2 eV, the other also direct absorption band with a gap of 5.15 eV was found situated in UV.</abstract>

Atomic layer deposited polycrystalline Cr2O3 films grown from chromyl chloride and methanol were analysed using spectrophotometry, spectral ellipsometry and atomic force microscopy. The films possessed polycrystalline eskolaite structure with rough sublayer in contact with air. Using the positions and peak widths of the two visible absorption bands as fixed from absorption measurements, we could determine the optical dispersion of the film material in 1.3 – 6 eV energy region. A direct band gap of chromia film grown in these conditions was 3.2 eV, the other also direct absorption band with a gap of 5.15 eV was found situated in UV.

Dispersion of chromia films (eskolaite) in UV-VIS

Journal of Electrical Engineering

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

{"article-title":"Dispersion of chromia films (eskolaite) in UV-VIS"}

Atomic layer deposited polycrystalline Cr2O3 films grown from chromyl chloride and methanol were analysed using spectrophotometry, spectral ellipsometry and...

Dispersion of chromia films (eskolaite) in UV-VIS

Published Online: Sep 28, 2019

Page range: 36 - 43

Received: Mar 19, 2019

DOI: https://doi.org/10.2478/jee-2019-0039

Keywords
CrO, ellipsometry, spectrophotometry, dispersion, band gap

© 2019 Aarne Kasikov et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Dispersion of chromia films (eskolaite) in UV-VIS

Published Online: Sep 28, 2019

Page range: 36 - 43

Received: Mar 19, 2019

DOI: https://doi.org/10.2478/jee-2019-0039

KeywordsCrO, ellipsometry, spectrophotometry, dispersion, band gap

© 2019 Aarne Kasikov et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Keywords
CrO, ellipsometry, spectrophotometry, dispersion, band gap