<abstract xmlns="http://www.w3.org/1999/xhtml"><p>Electrostatic actuators have major role in many MEMS devices, e.g. sensors, actuators. The amount of applied voltage to an electrostatic micro-actuator has a direct impact on the amplitude of deflection throughout the cantilever. This research aims to study the effect of the electrode length and the applied voltage on the amplitude of deflection of the micro-cantilever. Also, the resonant frequency for the cantilever was computed for full length and compared with simulation results. Finite element method, ANSYS was used as a simulation tool.</p></abstract>

Electrostatic actuators have major role in many MEMS devices, e.g. sensors, actuators. The amount of applied voltage to an electrostatic micro-actuator has a direct impact on the amplitude of deflection throughout the cantilever. This research aims to study the effect of the electrode length and the applied voltage on the amplitude of deflection of the micro-cantilever. Also, the resonant frequency for the cantilever was computed for full length and compared with simulation results. Finite element method, ANSYS was used as a simulation tool.

The Effect of the Electrode Position on the Dynamic Behavior of an Electrostatically Actuated Microcantilever

School of Mechanical Engineering, Faculty of Engineering

Sudan University of Sciences and Technology

PLOP Department, Petro-Energy E&P Co. Ltd

Department of Mechanical and Industrial Engineering, College of Engineering

Acta Universitatis Sapientiae, Electrical and Mechanical Engineering

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Electrostatic actuators have major role in many MEMS devices, e.g. sensors, actuators. The amount of applied voltage to an electrostatic micro-actuator has a...

The Effect of the Electrode Position on the Dynamic Behavior of an Electrostatically Actuated Microcantilever

Published Online: Dec 31, 2019

Page range: 34 - 41

Received: Aug 08, 2017

DOI: https://doi.org/10.2478/auseme-2019-0003

Keywords
Electrode size, finite element analysis, cantilever

© 2019 Mohamed Ahmed Eshag et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

The Effect of the Electrode Position on the Dynamic Behavior of an Electrostatically Actuated Microcantilever

Published Online: Dec 31, 2019

Page range: 34 - 41

Received: Aug 08, 2017

DOI: https://doi.org/10.2478/auseme-2019-0003

KeywordsElectrode size, finite element analysis, cantilever

© 2019 Mohamed Ahmed Eshag et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Keywords
Electrode size, finite element analysis, cantilever