<abstract xmlns="http://www.w3.org/1999/xhtml">The paper investigates the options to increase the production yield of temperature compensated surface acoustic wave (SAW) devices with a defined range of operational frequencies. The paper focuses on the preparation of large wafers with SiO2 and AlN/Si3N4 depositions. Stability of the intermediate SiO2 layer is achieved by combining high power density UV radiation with annealing in high humidity environment. A uniform thickness of the capping AlN layer is achieved by local high-rate etching with a focused ion beam emitted by the FALCON ion source. Operation parameters and limitations of the etching process are discussed.</abstract>

The paper investigates the options to increase the production yield of temperature compensated surface acoustic wave (SAW) devices with a defined range of operational frequencies. The paper focuses on the preparation of large wafers with SiO2 and AlN/Si3N4 depositions. Stability of the intermediate SiO2 layer is achieved by combining high power density UV radiation with annealing in high humidity environment. A uniform thickness of the capping AlN layer is achieved by local high-rate etching with a focused ion beam emitted by the FALCON ion source. Operation parameters and limitations of the etching process are discussed.

Operation modes of the FALCON ion source as a part of the AMS cluster tool

V. N. Karazin Kharkiv National University, 4 Svobody Sq., 61022, Kharkiv, Ukraine

Micron Surface Technologies, 5033 Dantes View Drive, Calabasas, CA 91301, United States

Advanced Modular Systems, Inc, 354 South Fairview Ave., B1, Goleta, CA 93117, United States

Nukleonika

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

{"article-title":"Operation modes of the FALCON ion source as a part of the AMS cluster tool"}

The paper investigates the options to increase the production yield of temperature compensated surface acoustic wave (SAW) devices with a defined range of...

Operation modes of the FALCON ion source as a part of the AMS cluster tool

Published Online: Jun 22, 2015

Page range: 327 - 330

Received: May 19, 2014

Accepted: May 05, 2015

DOI: https://doi.org/10.1515/nuka-2015-0059

Keywords
FALCON, ion sourcem, surface wave, cluster tool

© Oleksii Girka et al.

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Operation modes of the FALCON ion source as a part of the AMS cluster tool

Published Online: Jun 22, 2015

Page range: 327 - 330

Received: May 19, 2014

Accepted: May 05, 2015

DOI: https://doi.org/10.1515/nuka-2015-0059

KeywordsFALCON, ion sourcem, surface wave, cluster tool

© Oleksii Girka et al.

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Keywords
FALCON, ion sourcem, surface wave, cluster tool