<abstract xmlns="http://www.w3.org/1999/xhtml"><p>This paper presents a novel phase-shift arctangent (PSA) interpolation method to improve the measurement accuracy of a planar capacitive incremental displacement sensor. Signals of planar capacitive micro-sensors acquire waveform errors, including sensitivity differences and phase-shift errors, because of static errors and dynamic disturbances. In the proposed PSA scheme, such errors are removed completely by loading a particular arctangent function. Moreover, measuring efficiency of the proposed planar capacitive sensors is improved by combining coarse measurement and fine estimation. Experiments show unanimous results to model-based fitting. When electrode length is four times the gap distance, applying the PSA interpolation method decreases waveform errors from more than 4 % to 1.72 %.</p></abstract>

This paper presents a novel phase-shift arctangent (PSA) interpolation method to improve the measurement accuracy of a planar capacitive incremental displacement sensor. Signals of planar capacitive micro-sensors acquire waveform errors, including sensitivity differences and phase-shift errors, because of static errors and dynamic disturbances. In the proposed PSA scheme, such errors are removed completely by loading a particular arctangent function. Moreover, measuring efficiency of the proposed planar capacitive sensors is improved by combining coarse measurement and fine estimation. Experiments show unanimous results to model-based fitting. When electrode length is four times the gap distance, applying the PSA interpolation method decreases waveform errors from more than 4 % to 1.72 %.

A Novel Quadrature Signal Estimation Method for a Planar Capacitive Incremental Displacement Sensor

College of Mechanical Engineering, Quzhou University, Jiuhua Rd., No. 78, 324000, Quzhou, China

School of Mechanical Engineering, Hangzhou Dianzi University, Baiyang 2nd Rd., No. 1158, 310018, Hangzhou, China

Measurement Science Review

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

This paper presents a novel phase-shift arctangent (PSA) interpolation method to improve the measurement accuracy of a planar capacitive incremental...

A Novel Quadrature Signal Estimation Method for a Planar Capacitive Incremental Displacement Sensor

Published Online: Jun 11, 2016

Page range: 127 - 133

Received: Nov 03, 2015

Accepted: May 27, 2016

DOI: https://doi.org/10.1515/msr-2016-0015

Keywords
Phase-shift arctangent method, capacitive displacement sensor, static and dynamic errors, accuracy improvement

© 2016 Jian-Ping Yu et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

A Novel Quadrature Signal Estimation Method for a Planar Capacitive Incremental Displacement Sensor

Published Online: Jun 11, 2016

Page range: 127 - 133

Received: Nov 03, 2015

Accepted: May 27, 2016

DOI: https://doi.org/10.1515/msr-2016-0015

KeywordsPhase-shift arctangent method, capacitive displacement sensor, static and dynamic errors, accuracy improvement

© 2016 Jian-Ping Yu et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Keywords
Phase-shift arctangent method, capacitive displacement sensor, static and dynamic errors, accuracy improvement