<abstract xmlns="http://www.w3.org/1999/xhtml"><p>In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.</p></abstract>

In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.

Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

Technological Design Institute of Scientific Instrument Engineering, Siberian Branch of the Russian Academy of Sciences (TDI SIE SB RAS), 41, Russkaya str., Novosibirsk, 630058, Russia

Novosibirsk State University, 2, Pirogova str., Novosibirsk, 630090, Russia

Novosibirsk State Technical University, 20, K. Marksa pr., Novosibirsk, 630073, Russia

Measurement Science Review

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

{"article-title":"Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer"}

In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be...

Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

Published Online: Mar 11, 2015

Page range: 9 - 12

Received: Oct 03, 2014

Accepted: Jan 24, 2015

DOI: https://doi.org/10.1515/msr-2015-0002

Keywords
Phase shifting interferometry, nanorelief measurement, measurement error

© E. Sysoev, R. Kulikov, I. Vykhristyuk, Yu. Chugui

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

Published Online: Mar 11, 2015

Page range: 9 - 12

Received: Oct 03, 2014

Accepted: Jan 24, 2015

DOI: https://doi.org/10.1515/msr-2015-0002

KeywordsPhase shifting interferometry, nanorelief measurement, measurement error

© E. Sysoev, R. Kulikov, I. Vykhristyuk, Yu. Chugui

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Keywords
Phase shifting interferometry, nanorelief measurement, measurement error