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Journals
Materials Science-Poland
Volume 34 (2016): Issue 4 (December 2016)
Open Access
Epitaxial regrowth of InP/InGaAs heterostructure on patterned, nonplanar substrates
Łukasz Kosior
Łukasz Kosior
,
Damian Radziewicz
Damian Radziewicz
,
Iwona Zborowska-Lindert
Iwona Zborowska-Lindert
,
Andrzej Stafiniak
Andrzej Stafiniak
,
Mikołaj Badura
Mikołaj Badura
and
Beata Ściana
Beata Ściana
| Nov 06, 2016
Materials Science-Poland
Volume 34 (2016): Issue 4 (December 2016)
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Published Online:
Nov 06, 2016
Page range:
872 - 880
Received:
Apr 25, 2016
Accepted:
Sep 06, 2016
DOI:
https://doi.org/10.1515/msp-2016-0103
Keywords
epitaxy
,
MOVPE
,
patterned substrate
,
wet etching
,
mask material
© 2016 Wroclaw University of Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Łukasz Kosior
Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław,
Poland
Damian Radziewicz
Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław,
Poland
Iwona Zborowska-Lindert
Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław,
Poland
Andrzej Stafiniak
Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław,
Poland
Mikołaj Badura
Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław,
Poland
Beata Ściana
Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław,
Poland