Fluence [ions/cm2] | Electrical conductivity [(Ω· cm)−1] |
---|---|
Pristine | 6.84 × 10−09 |
5 × 1013 | 7.41 × 10−07 |
1 × 1014 | 7.45 × 10−07 |
5 × 1014 | 7.64 × 10−07 |
1 × 1015 | 1.06 × 10−06 |
5 × 1015 | 6.52 × 10−06 |
Ion type | Energy [keV] | Se [eV/nm] | Sn [eV/nm] | Range [nm] |
---|---|---|---|---|
Au+ | 400 | 6.673 × 102 | 1.689 × 103 | 220 |
Fluence [ions/cm2] | RMS roughness [nm] |
---|---|
Pristine | 1.71 |
5 × 1013 | 8.95 |
5 × 1014 | 1.02 |
5 × 1015 | 0.66 |
Fluence [ions/cm2] | Optical band gap energy Eg [eV] | % decrease in band gap energy | Urbach energy Eu [eV] |
---|---|---|---|
Pristine | 3.15 | – | 0.17 |
5 × 1013 | 3.06 | 2.86 | 0.35 |
1 × 1014 | 2.94 | 6.67 | 0.68 |
5 × 1014 | 1.14 | 64 | 0.88 |
1 × 1015 | 1.10 | 65 | 0.90 |
5 × 1015 | 1.05 | 67 | 0.91 |