<abstract xmlns="http://www.w3.org/1999/xhtml">The morphology and chemical bods of p-type and n-type porous Si was compared. The surface of n-type sample is smooth, homogenous without any features. The surface of p-type sample reveals micrometer-sized islands. FTIR investigation reveals various distribution of SiOxHy complexes in both p-and n-type samples. From the conditions leading to porous silicon layer formation (the presence of holes) we suggest both SiOxHy and SiFxHy complexes in the layer.</abstract>

The morphology and chemical bods of p-type and n-type porous Si was compared. The surface of n-type sample is smooth, homogenous without any features. The surface of p-type sample reveals micrometer-sized islands. FTIR investigation reveals various distribution of SiOxHy complexes in both p-and n-type samples. From the conditions leading to porous silicon layer formation (the presence of holes) we suggest both SiOxHy and SiFxHy complexes in the layer.

Morphology and FT IR spectra of porous silicon

Institute of Medical Physics, Biophysics, Informatics and Telemedicine, Faculty of Medicine

Faculty of Chemical and Food Technology of STU

Journal of Electrical Engineering

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

{"article-title":"Morphology and FT IR spectra of porous silicon"}

The morphology and chemical bods of p-type and n-type porous Si was compared. The surface of n-type sample is smooth, homogenous without any features. The...

Morphology and FT IR spectra of porous silicon

Published Online: Dec 29, 2017

Page range: 53 - 57

Received: Apr 23, 2017

DOI: https://doi.org/10.1515/jee-2017-0056

Keywords
porous silicon, nanoparticles, anodic etching, morphology

© 2017 Martin Kopani et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Morphology and FT IR spectra of porous silicon

Published Online: Dec 29, 2017

Page range: 53 - 57

Received: Apr 23, 2017

DOI: https://doi.org/10.1515/jee-2017-0056

Keywordsporous silicon, nanoparticles, anodic etching, morphology

© 2017 Martin Kopani et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Keywords
porous silicon, nanoparticles, anodic etching, morphology