Open Access

Electrostatic field in terms of geometric curvature in membrane MEMS devices


Cite

1. H.C. Nathanson and W.E. Newell and R.A. Wickstrom and J.R. Lewis, The Resonant Gate Transistor, IEEE Transaction on Electron Devices, vol. 14, pp. 117-133, 1964.10.1109/T-ED.1967.15912Search in Google Scholar

2. M. Huja and M. Husak, Thermal Microactuators for Optical Purpose, Coding and Computing, pp. 137-142, 2001.Search in Google Scholar

3. X. Yang and Y.C. Tai and C.M. Ho, Micro Bellow Actuators, Trans- ducers'97, pp. 45-48, 1997.Search in Google Scholar

4. S. Bhansali and A.L. Zhang and R.B. Zmood and P. Jones and D.K. Sood, Prototype Feedback Controlled Bi-Directional Actuation System for MEMS Application, Journal Microeletromechanic Systems, vol. 9, pp. 245-251, 2000.10.1109/84.846705Search in Google Scholar

5. A. Ludwig and E. Quandt, Giant Magnetostrictive Thin Films for Application in Microelectromechanical Systems, Journal of Applied Physics, vol. 87, pp. 4691-4695, 2000.Search in Google Scholar

6. M. Elwenspoek and R. Wiegerink, Micromechanical Sensors. 2001.10.1007/978-3-662-04321-9Search in Google Scholar

7. S.D. Senturia, Microsystem Design. Kluwer Academic Publisher, 2001.10.1007/b117574Search in Google Scholar

8. E. Schaffer and T Thurn-Albrecht and T.P. Russell and U. Steiner, Electrically Induced Structure Formation and Pattern Transfer, Nature, vol. 403, pp. 518-524, 2001.10.1038/35002540Search in Google Scholar

9. D. Bernstein and P. Guidotti and J. Pelesko, Analytical and Numerical Analysis of Electrostatically Actuated MEMS Devices, in Proceedings of MSM 2000, pp. 489-492, 2000.Search in Google Scholar

10. J.A. Pelesko and X.Y. Chen, Electrostatic Deections of Circular Elastic Membranes, Journal of Electrostatics, vol. 57, no. 1, pp. 1-12, 2003.10.1016/S0304-3886(02)00073-6Search in Google Scholar

11. M.O. Hasse and M.A. Hawwa and H.M.Alqahtani, Modeling the Electrostatic Deection of a MEMS Multilayers Based Actuator, Mathemat- ical Problems in Engineering, vol. 2013, 2013.10.1155/2013/959232Search in Google Scholar

12. AA.VV., MEMS for Biomedical Application. Elsevier, 2012.Search in Google Scholar

13. A. Folch, Introduction to Bio-MEMS. Boca Raton, 2013.Search in Google Scholar

14. P. Das Payel and M. Kanoria, Magneto-Thermo-Elastic Waves in an Infinite Perfectly Conducting Elastic Solid with Energy Dissipation, Applied Mathematics and Mechanics, vol. 30, no. 2, pp. 221-228, 2009.10.1007/s10483-009-0209-6Search in Google Scholar

15. P. Di Barba and A. Lorenzi, A Magneto-Thermo-Elastic Identification Problem with a Moving Boundary in a Micro-Device, Milan Journal of Mathematics, vol. 81, no. 2, pp. 347-383, 2013.10.1007/s00032-013-0209-zSearch in Google Scholar

16. R. Selvamani and P. Pommusamy, Wave Propagation in a Transversely Isotropic Magneto-Electro-Elastic Solid Bar Immersed in an Inviscid Fluid, Journal of the Egyptian Mathematical Society, vol. 24, pp. 92-99, 2016.10.1016/j.joems.2014.06.016Search in Google Scholar

17. P. Di Barba and S. Wiak, Evolutionary Computing and Optimal Design of MEMS, IEEE Trans Mechatronics, vol. 20, no. 4, pp. 1660-1667, 2015.Search in Google Scholar

18. P. Di Barba and M.E. Mognaschi and P. Venini and S. Wiak, Biogeography-Inspired Multiobjective Optimisation for Helping MEMS Synthesis, Archives of Electrical Engineering, in press.Search in Google Scholar

19. D. Cassani and L. Fattorusso and A. Tarsia, Nonlocal Singular Problems and Application to MEMS, in Proceedings of WCE 201, 2013.Search in Google Scholar

20. D. Cassani and L. Fattorusso and A. Tarsia, Nonlocal Dynamic Problems with Singular Nonlinearities and Application to MEMS, Progress in Nonlinear Differential Equations and their Applications, vol. 85, pp. 185-206, 2014.10.1007/978-3-319-04214-5_11Search in Google Scholar

21. D. Cassani and A. Tarsia, Periodic Solutions to Nonlocal MEMS Equations, Discrete and Continuousd Dynamical Systems - Serie S, vol. 9, no. 3, pp. 631-642, 2016.10.3934/dcdss.2016017Search in Google Scholar

22. S.E. Lyshevski, MEMS and NEMS: Systems, Devices and Structures. Boca Raton, 2002.Search in Google Scholar

23. D. Cassani and M. d'O and N. Ghoussoub, On a Fourth Order Elliptic Problem with a Singular Nonlinearity, Nonlinear Studies, vol. 9, pp. 189-209, 2009.10.1515/ans-2009-0109Search in Google Scholar

24. D. Cassani and B. Kaltenbacher and A. Lorenzi, Direct and Inverse Problem Related to MEMS, Inverse Problems, vol. 25, 2009.10.1088/0266-5611/25/10/105002Search in Google Scholar

25. C. Cowan and P. Esposito and N. Ghoussoub and Mordifam, The Critical Dimension for a Fourth Order Elliptic Problem with Singular Nonlinearity, Arch. Ration. Mech. Anal., vol. 198, pp. 763-787, 2010.10.1007/s00205-010-0367-xSearch in Google Scholar

26. C. Cowan and P. Esposito and N. Ghoussoub, Regularity of Extremal Solutions in Fourth Order Nonlinear Eigenvalue Problems on General Domains, Discrete and Continuous Dynamical Systems, vol. 28, no. 2, pp. 1-19, 2010.10.3934/dcds.2010.28.1033Search in Google Scholar

27. P. Laurencot and C.Walker, A Stationary Free Boundary Problem Modeling Electrostatic MEMS, Arch. Ration. Mech. Anal., vol. 207, no. 1, pp. 139-158, 2013.10.1007/s00205-012-0559-7Search in Google Scholar

28. J.A. Pelesko and D.H. Bernstein, Modeling MEMS and NEMS. Chapman & Hall, 2003.10.1201/9781420035292Search in Google Scholar

29. J.D. Jackson, Classical Electrodynamics. John Wiley, 1975.Search in Google Scholar

30. G. Barozzi and F. Gasparini, Fondamenti di Elettrotecnica: Elettromag- netismo. UTET, 1989.Search in Google Scholar

31. P.B. Bayley and L.F. Shampine and P.E. Waltmman, Nonlinear Two Point Boundary Value Problems. Academic Press, 1968.Search in Google Scholar

eISSN:
2038-0909
Language:
English
Publication timeframe:
Volume Open
Journal Subjects:
Mathematics, Numerical and Computational Mathematics, Applied Mathematics