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Acta Universitatis Sapientiae, Electrical and Mechanical Engineering
Volume 8 (2016): Issue 1 (December 2016)
Open Access
Macroscopic Thin Film Deposition Model for the Two-Reactive-Gas Sputtering Process
András Kelemen
András Kelemen
,
Domokos Biró
Domokos Biró
,
Albert-Zsombor Fekete
Albert-Zsombor Fekete
,
László Jakab-Farkas
László Jakab-Farkas
and
Róbert Rossi Madarász
Róbert Rossi Madarász
| Sep 09, 2017
Acta Universitatis Sapientiae, Electrical and Mechanical Engineering
Volume 8 (2016): Issue 1 (December 2016)
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Published Online:
Sep 09, 2017
Page range:
62 - 78
Received:
Feb 15, 2017
DOI:
https://doi.org/10.1515/auseme-2017-0005
Keywords
DC magnetron sputtering
,
thin film deposition
,
reactive sputtering
,
macroscopic modelling
© 2016 András Kelemen et al., published by De Gruyter Open
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
András Kelemen
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of Transylvania
Tg. Mureş
Domokos Biró
Department of Mechanical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of Transylvania
Tg. Mureş
Albert-Zsombor Fekete
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of Transylvania
Tg. Mureş
László Jakab-Farkas
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of Transylvania
Tg. Mureş
Róbert Rossi Madarász
Department of Electrical Engineering, Faculty of Technical and Human Sciences, Sapientia Hungarian University of Transylvania
Tg. Mureş