Development of a Pressure Measuring Unit Based on a Thermal Conductivity Gauge and a Low-Cost Embedded Solution for Mid-Range Vacuum Applications

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Abstract

This study presents the development of a pressure measuring unit based on a Pirani gauge and a dedicated embedded system, incorporating a simple, low-cost practical solution for significantly reducing the various measurement altering factors, such as drifts, offsets and set point drifts. This is achieved by eliminating the conventional differential analogue signal processing stage and replacing it with a high resolution analog to digital converter. Therefore the goal was to minimize the number of the electronic components whose operation is influenced by variations in ambient temperature. The main topics discussed in the paper include the presentation of the measuring circuit’s configuration, the development of a low-cost embedded system, the calibration method and the solution implemented for eliminating the platforms limitation regarding the precision of the different mathematical calculations.

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