Low Humidity Characteristics of Polymer-Based Capacitive Humidity Sensors

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Abstract

Polymer-based capacitive humidity sensors emerged around 40 years ago; nevertheless, they currently constitute large part of sensors’ market within a range of medium (climatic and industrial) humidity 20−80%RH due to their linearity, stability and cost-effectiveness. However, for low humidity values (0−20%RH) that type of sensor exhibits increasingly nonlinear characteristics with decreasing of humidity values. This paper presents the results of some experimental trials of CMOS polymer-based capacitive humidity sensors, as well as of modelling the behaviour of that type of sensor. A logarithmic functional relationship between the relative humidity and the change of sensor output value at low humidity is suggested.

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Metrology and Measurement Systems

The Journal of Committee on Metrology and Scientific Instrumentation of Polish Academy of Sciences

Journal Information


IMPACT FACTOR 2016: 1.598

CiteScore 2016: 1.58

SCImago Journal Rank (SJR) 2016: 0.460
Source Normalized Impact per Paper (SNIP) 2016: 1.228

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