Study of Copper Nitride Thin Film Structure

A. Kuzmin 1 , A. Kalinko 1 , A. Anspoks 1 , J. Timoshenko 1 , and R. Kalendarev 1
  • 1 Institute of Solid State Physics, University of Latvia, 8 Kengaraga Str., Riga, LV-1063, LATVIA


X-ray diffraction and x-ray absorption spectroscopy at the Cu K-edge were used to study the atomic structure in copper nitride (Cu3N) thin films. Textured nanocrystalline films are obtained upon dc magnetron sputtering on substrates heated at about 190 °C, whereas amorphous films having strongly disordered structure already in the second coordination shell of copper are deposited in the absence of heating.

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