Published Online: Jul 22, 2009
Page range: 50 - 54
DOI: https://doi.org/10.2478/v10047-009-0009-y
This content is open access.
Thin films of amorphous Si on glass were crystallized by pulsed nano- and picosecond lasers. Two methods for creating the desired patterns of crystallized regions were used. In the former, the pattern is produced by a focused laser beam, and in the latter it is made using a prefabricated mask. The electric conductivity of crystallized films increases by more than 4 orders of magnitude in comparison with untreated amorphous films.