Optical properties of the plasma hydrogenated ZnO thin films

Open access


We have optimized the deposition of the highly electrically resistive undoped (intrinsic) polycrystalline ZnO thin layers on fused silica substrates by the DC reactive magnetron sputtering of metallic zinc target in argonne/oxide atmosphere and we introduced the post-deposition hydrogen plasma doping. The thickness of thin film was evaluated by reflectance interferometry using the metallographic optical microscope fiber coupled to the CCD spectrometer operating in 400-1000 nm spectral range. The optical absorption was measured by photothermal deflection spectroscopy operating in 300-1600 nm spectral range. The change of the optical absorption edge and the increase of the infrared optical absorption was detected in hydrogenated ZnO. The increase of the infrared optical absorption goes with the increase of the electrical conductivity. We conclude that the plasma hydrogenation of the intrinsic ZnO thin films is related to increase of the free carrier concentration.

If the inline PDF is not rendering correctly, you can download the PDF file here.

  • [1] U. Özgür Y. I. Alivov C. Liu A. Teke M.A. Reshchnikov S. Dogan V. Avrutin S.-J. Cho and H. Morkoç “A comprehensive review of ZnO materials and devices” Journal of Applied Physics vol. 98 no. 4 (2005) 041301.

  • [2] L.-Y. Chen W.-H. Chen J. J. Wang F. C.-N. Hong and Y.-K. Su “Hydrogen-doped high conductivity ZnO films deposited by radio-frequency magnetron sputtering” Applied Physics Letters vol. 85 no. 23 (2004) 5628-5630.

  • [3] F. Bustanafruz M. Fazli M. R. Mohammadizadeh and M. Jafar Tafreshi “Optical and electronic properties of H-doped ZnO” Optical and Quantum Electronics vol. 48 no. 5 (2016).

  • [4] P. Kelly and R. Arnell “Magnetron sputtering: a review of recent developments and applications” Vacuum vol. 56 no. 3 (2000) 159-172.

  • [5] Z. Remes J. Stuchlik A. Purkrt Y.-Y. Chang J. Jirasek P. Stenclova V. Prajzler and P. Nekvindova “ZnO Thin Films Prepared by Reactive Magnetron Sputtering” NANOCON 2016 - 8th International Conference on Nanomaterials - Research and Application Conference Proceedings 8 vol. Hotel Voronez I Brno Czech Republic TANGER Ltd.(2016).

  • [6] Y.-Y. Chang N. Neykova J. Stuchlik A. Purkrt and Z. Remes “Hydrogen Plasma Treatment of ZnO Thin Films” NANOCON 2016 - 8th International Conference on Nanomaterials - Research and Application Conference Proceedings 8 vol. Hotel Voronez I Brno Czech Republic TANGER Ltd.(2016).

  • [7] J. Musil P. Baroch J. Vlček K. H. Nam and J. G. Han “Reactive magnetron sputtering of thin films: present status and trends” Thin Solid Films vol 475 no. 1-2 (2005) 208-218.

  • [8] J. Soucek “Measurement and Modeling of Optical Spectra of Thin-Film Nanocomposite Materials” Diploma Theses Faculty of Mechatronics Informatics and Interdisciplinary Studies Technical University of Liberec (2016).

  • [9] W. B. Jackson N. M. Amer A. C. Boccara and D. Fournier “Photothermal deflection spectroscopy and detection” Applied Optics vol. 20 no. 8 (1981) 1333-1344.

  • [10] Z. Remes O. Babchenko M. Varga J. Stuchlik V. Jirasek V. Prajzler P. Nekvindova and A. Kromka “Preparation and optical properties of nanocrystalline diamond coatings for infrared planar waveguides” Thin Solid Films vol. 618(2016) pp. 130-133.

  • [11] J. G. Webster(Ed) Electrical Measurement Signal Processing and Displays Principles and applications Engineering series Boca Raton CRC Press (2003) 1 pp.

  • [12] H. G. Tompkins Spectroscopic Ellipsometry and Reflectometry: A User’s Guide New York Wiley (1999) 228 pp.

Journal information
Impact Factor

IMPACT FACTOR 2018: 0.636
5-year IMPACT FACTOR: 0.663

CiteScore 2018: 0.88

SCImago Journal Rank (SJR) 2018: 0.200
Source Normalized Impact per Paper (SNIP) 2018: 0.771

All Time Past Year Past 30 Days
Abstract Views 0 0 0
Full Text Views 224 98 6
PDF Downloads 178 116 4