Microelectrode array systems for their use in single-nanowire-based gas sensor platforms are developed. The topology of the system is designed with the aim of determining the optimal conditions and the factors involved in the selective integration of gas sensitive semiconducting metal oxide nanowires via dielectrophoresis method. Thus various electrode geometries with electrode gaps between 2 and 10 μm and electrode tip-end shapes are investigated employing tungsten oxide nanowires synthetized via aerosol-assisted chemical vapor deposition. Results obtained from SEM, optical microscopy and electrical tests demonstrate that the integration and electrical contact of single nanowires across the electrodes is achieved in the systems with electrode gaps below 3 μm. These results are discussed and further improvements in the design of these systems are suggested.
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