Microelectrode array systems for their use in single nanowire-based gas sensor platforms

Open access


Microelectrode array systems for their use in single-nanowire-based gas sensor platforms are developed. The topology of the system is designed with the aim of determining the optimal conditions and the factors involved in the selective integration of gas sensitive semiconducting metal oxide nanowires via dielectrophoresis method. Thus various electrode geometries with electrode gaps between 2 and 10 μm and electrode tip-end shapes are investigated employing tungsten oxide nanowires synthetized via aerosol-assisted chemical vapor deposition. Results obtained from SEM, optical microscopy and electrical tests demonstrate that the integration and electrical contact of single nanowires across the electrodes is achieved in the systems with electrode gaps below 3 μm. These results are discussed and further improvements in the design of these systems are suggested.

[1] N. S. Ramgir, Y. Yang and M. Zacharias, ”Nanowire-Based Sensors”, Small, vol. 6, pp. 1705-1722, 2010.

[2] D. R. Miller, S. A. Akbar and P. A. Morris, ”Nanoscale metal oxide-based heterojunctions for gas sensing: A review”, Sensors & Actuators: B. Chemical, vol. 204, pp. 250-272, 2014.

[3] A. Gurlo, ”Nanosensors: towards morphological control of gas sensing activity”, SnO2, In2O3, ZnO and WO3 case studies.Nanoscale, vol. 3, pp. 154-165, 2011.

[4] H. Huang, B. Liang, Z. Liu, X. Wang, D. Chen and G. Shen, ”Metal oxide nanowire transistors”, Journal of Materials Chemistry, vol. 22, pp. 13428-13445, 2012.

[5] R. G. Hobbs, N. Petkov and J. D. Holmes, ”Semiconductor Nanowire Fabrication by Bottom-Up and Top-Down Paradigms”, Chemistry of Materials, vol. 24, pp. 1975-1991, 2012.

[6] S. Vallejos, I. Grácia, O. Chmela, E. Figueras, J. Hubálek and C. Cané, ”Chemoresistive micromachined gas sensors based on functionalized metal oxide nanowires: Performance and reliability”, Sensors and Actuators B: Chemical, vol. 235, pp. 525-534, 2016.

[7] S. Vallejos, P. Umek and C. Blackman, ”Aerosol Assisted Chemical Vapour Deposition Control Parameters for Selective Deposition of Tungsten Oxide Nanostructures”, Journal of Nanoscience and Nanotechnology, vol. 11, pp. 8214-8220, 2011.

[8] M. Ling and C. Blackman, ”Growth mechanism of planar or nanorod structured tungsten oxide thin films deposited via aerosol assisted chemical vapour deposition (AACVD)”, physica status solidi (c), vol. 12, pp. 869-877, 2015.

[9] N. K. R. Palapati, E. Pomerantseva and A. Subramanian, ”Single nanowire manipulation within dielectrophoretic force fields the sub-crossover frequency regime”, Nanoscale, vol. 7, pp. 3109-3116, 2015.

[10] S. Raychaudhuri, S. A. Dayeh, D. Wang and E. T. Yu, ”Precise Semiconductor Nanowire Placement Through Dielectrophoresis”, Nano Letters, vol. 9, pp. 2260-2266, 2009.

[11] I. Gablech, V. Svatoš, O. Caha, M. Hrabovsk´y, J. Prášek, J. Hubálek, et al ”Preparation of (001) preferentially oriented titanium thin films by ion-beam sputtering deposition on thermal silicon dioxide”, Journal of Materials Science, vol. 51, pp. 3329-3336, 2016.

[12] S. Ashraf, C. S. Blackman, R. G. Palgrave, S. C. Naisbitt and I. P. Parkin, ”Aerosol assisted chemical vapour deposition of WO3 thin films from tungsten hexacarbonyl and their gas sensing properties”, Journal of Materials Chemistry, vol. 17, pp. 3708-3713, 2007.

[13] N. Singh, PLEASE COMPLETE ”Sensing properties of different classes of gases based on the nanowire-electrode junction barrier modulation”, Nanoscale, vol. 3, pp. 1760-1765, 2011.

[14] T.-Y. Wei, P.-H. Yeh, S.-Y. Lu and Z. L. Wang, ”Gigantic Enhancement Sensitivity Using Schottky Contacted Nanowire Nanosensor”, Jour. of the American Chemical Society, vol. 131, pp. 17690-17695, 2009.

Journal of Electrical Engineering

The Journal of Slovak University of Technology

Journal Information

IMPACT FACTOR 2017: 0.508
5-year IMPACT FACTOR: 0.549

CiteScore 2017: 0.78

SCImago Journal Rank (SJR) 2017: 0.205
Source Normalized Impact per Paper (SNIP) 2017: 0.506


All Time Past Year Past 30 Days
Abstract Views 0 0 0
Full Text Views 109 109 13
PDF Downloads 39 39 8