Vacuum microdevices

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Vacuum microdevices

In the paper MEMS-type microsystems working in vacuum conditions are described. All the benefits and drawbacks of vacuum generated in microcavities are discussed. Different methods are used to produce vacuum in microcavity of MEMS. Some bonding techniques, sacrificial layer method or getter materials are presented. It is concluded that the best solution would be to invent some kind of vacuum micropump integrated with MEMS structure. Few types of already existing vacuum micropumps are shown, but they are not able to generate high vacuum. As the most promising candidate for miniaturization an orbitron pump was selected. The working principle and novel concepts of its construction are described. The most important part of the micropump, used for gas ionization, is a field-emission electron source. Results of a research on a lateral electron source with gold emissive layer for integration with a micropump are presented.

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Bulletin of the Polish Academy of Sciences Technical Sciences

The Journal of Polish Academy of Sciences

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IMPACT FACTOR 2016: 1.156
5-year IMPACT FACTOR: 1.238

CiteScore 2016: 1.50

SCImago Journal Rank (SJR) 2016: 0.457
Source Normalized Impact per Paper (SNIP) 2016: 1.239

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